Capacitive linear displacement sensor and movable ruler thereof

A linear displacement, capacitive technology, applied in the field of displacement sensors, can solve the problems of limiting the signal-to-noise ratio and accuracy of the sensor, low utilization of probe area, and small number of probe electrodes, so as to suppress harmonic components and enhance anti-interference. capacity, the effect of improving area utilization

Active Publication Date: 2021-06-22
通用技术集团国测时栅科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] In recent years, a kind of time grating linear displacement sensor with clock pulse as the reference of displacement measurement has been developed in China, such as the electric field type time grating linear displacement sensor based on single-row multi-layer structure disclosed by CN103822571A. This sensor can realize high-precision linear displacement sensor. Displacement measurement, but it still has the following problems: (1) The probe electrode adopts the form of a single probe, the utilization rate of the probe area is low, the coupling capacitance value is small, and the number of probe electrodes is small, which limits the signal-to-noise ratio and accuracy of the sensor (2) The connection of A, B, C, and D excitation phase electrodes of the fixed-length electrodes is connected by the middle lead wire, and the crosstalk of the lead wires is relatively large, resulting in large signal interference

Method used

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  • Capacitive linear displacement sensor and movable ruler thereof
  • Capacitive linear displacement sensor and movable ruler thereof
  • Capacitive linear displacement sensor and movable ruler thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0045] Embodiment 1: as Figure 1 to Figure 4 The capacitive linear displacement sensor shown includes a fixed scale 1 and a moving scale 2, the fixed scale 1 includes a moving scale base 12 and an excitation electrode 11 arranged on the upper surface of the fixed scale base 12, and the moving scale 2 includes a moving scale base 22 and a set The sensing electrode 21 on the lower surface of the moving scale base body 22 . The lower surface of the moving-scale base 22 is facing parallel to the upper surface of the fixed-scale base 12, leaving a gap of 0.5 mm. Both the fixed-scale base 12 and the moving-scale base 22 use ceramics as the base material, and a layer of ceramic is sprayed on the ceramic surface. The iron-nickel alloy is used as the pole piece of the electrode.

[0046] Such as figure 1 , figure 2 As shown, the excitation electrode 11 is composed of a row of rectangular pole pieces with the same size and a pole distance of W=2mm arranged at equal intervals along ...

Embodiment 2

[0050] Embodiment 2: as Figure 6 to Figure 8 The capacitive linear displacement sensor shown has the same measurement principle and most of its structures as in Embodiment 1, except that the shape of the sensing pole piece in the sensing electrode 21 is a parallelogram, and the parallelogram is composed of two identical oblique The line segment is surrounded by two straight line segments with a length of 1 mm at the start and end points. The distance between the starting points of two identical oblique line segments is 1 mm and the distance between the end points is 1 mm. Each oblique line segment is along the measurement direction. The length is 4mm, and the width along the front-back direction is 18mm, then the length of the sensing pole piece along the measurement direction is 5mm, and the width along the front-back direction is 18mm.

Embodiment 3

[0051] Embodiment 3: as Figure 9 to Figure 11 The capacitive linear displacement sensor shown has the same measurement principle and most of its structures as in Embodiment 1, except that the shape of the sensing pole piece in the sensing electrode 21 is a rectangle, and the length of the rectangle along the measuring direction is 1mm, along the The width in the front-rear direction is 18 mm.

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Abstract

The invention discloses a capacitive linear displacement sensor and a movable ruler thereof, the movable ruler comprises a movable ruler base body and an induction electrode, the induction electrode has a three-measuring-head or four-measuring-head structural form, the sensor comprises a fixed ruler and the movable ruler, the fixed ruler comprises a fixed ruler base body and an excitation electrode. The A-phase excitation signal lead and the C-phase excitation signal lead of the excitation electrode form a twisted pair on one side of the excitation electrode, and the B-phase excitation signal lead and the D-phase excitation signal lead form a twisted pair on the other side of the excitation electrode. The twisted pair structure can eliminate lead crosstalk, thereby reducing the influence of interference signals on the measurement precision, and ensuring the measurement precision. The three-measuring-head or four-measuring-head structural form can improve the area utilization rate of the sensing electrode and increase the coupling capacitance value, so that the signal-to-noise ratio is improved, data fusion is carried out on output signals of the sensing electrode, some harmonic errors of specific frequencies can be effectively eliminated, and the measurement precision is further improved.

Description

technical field [0001] The invention belongs to the field of displacement sensors, and in particular relates to a capacitive linear displacement sensor and a moving ruler thereof. Background technique [0002] In recent years, a kind of time grating linear displacement sensor with clock pulse as the reference of displacement measurement has been developed in China, such as the electric field type time grating linear displacement sensor based on single-row multi-layer structure disclosed by CN103822571A, which can realize high-precision linear displacement sensor. Displacement measurement, but it still has the following problems: (1) The probe electrode adopts the form of a single probe, the utilization rate of the probe area is low, the coupling capacitance value is small, and the number of probe electrodes is small, which limits the signal-to-noise ratio and accuracy of the sensor (2) The A, B, C, and D excitation phase electrodes of the fixed-length electrodes are connecte...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/02
CPCG01B7/02
Inventor 彭凯于治成刘小康王合文蒲红吉
Owner 通用技术集团国测时栅科技有限公司
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