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Parallel type three-degree-of-freedom precision micro-motion mechanism of composite differential branch chain and working method thereof

A parallel-connected, degree-of-freedom technology, applied in piezoelectric effect/electrostrictive or magnetostrictive motors, generators/motors, electrical components, etc., can solve the mechanism's natural frequency drop and ball hinge structure that affects the bearing capacity of the device , the influence of mechanism dynamic characteristics and other issues, to achieve the effect of strong anti-interference ability, good dynamic performance and strong bearing capacity

Active Publication Date: 2021-05-28
合肥名龙电子科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, the mass of the moving part of the mechanism will have a great impact on the dynamic characteristics of the mechanism. As the moving mass increases, the first-order natural frequency of the mechanism decreases
The common three-degree-of-freedom parallel mechanism is mostly realized by using the ball hinge branch chain, but the application of the ball hinge structure seriously affects the device's bearing capacity, anti-interference ability and dynamic performance, etc.

Method used

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  • Parallel type three-degree-of-freedom precision micro-motion mechanism of composite differential branch chain and working method thereof
  • Parallel type three-degree-of-freedom precision micro-motion mechanism of composite differential branch chain and working method thereof
  • Parallel type three-degree-of-freedom precision micro-motion mechanism of composite differential branch chain and working method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] A parallel three-degree-of-freedom precision micro-motion mechanism of a composite differential branch chain, including three sets of flexible drive units and an output block 24, the output block 24 is located at the center of the three sets of flexible drive units,

[0042] Each group of flexible driving units includes a piezoelectric ceramic driver and a driving block driven by the piezoelectric ceramic driver, and the two sides of the driving block are respectively positioned by a parallelogram flexible hinge 9 structure, and each adjacent two The edges of each driving block are connected to an intermediate block through a zigzag hinge, and each intermediate block is connected to the output block 24 through a semicircular hinge.

[0043] Preferably, the parallel-connected three-degree-of-freedom precision micro-motion mechanism also includes a frame 1, and three mounting slots are formed on the frame 1, and a piezoelectric ceramic driver is installed in each mounting ...

Embodiment 2

[0057] As described in Example 1, the working mode of the parallel three-degree-of-freedom precision micro-motion mechanism of the composite differential branch chain:

[0058] When the first piezoelectric ceramic driver 5 stretches, and when the second piezoelectric ceramic driver 6 and the third piezoelectric ceramic driver 7 contract according to a certain motion law, the output block 24 moves along the x direction; when the first piezoelectric ceramic driver 5, The third piezoelectric ceramic driver 7 stretches according to a certain motion law, and when the second piezoelectric ceramic driver 6 contracts simultaneously, the output block 24 moves along the y direction; when the first piezoelectric ceramic driver 5, the second piezoelectric ceramic driver 6, When the third piezoelectric ceramic driver 7 expands or contracts simultaneously, the output block 24 moves along the z direction.

Embodiment 3

[0060] 3.1 Static properties

[0061] For the convenience of simulation, the core structure is extracted from the parallel three-degree-of-freedom precision micro-motion mechanism. The thick bottom of the hinge of the three-dimensional vibrating device b=1 mm, and the piezoelectric actuators are arranged perpendicular to the first driving mass 8 , the second driving mass 10 and the third driving mass 11 .

[0062] A voltage is applied to the first driving block 8, and the first driving block 8 moves in the piezoelectric direction. In order to calculate the input stiffness of the device, a force of 100N is applied to the first driving block 8, and the obtained displacement nephogram is as follows Figure 5 shown. The displacement of the first drive block 8 is 28.5 μm, and the input stiffness is 3.509 N / μm. The output block 24 has moved 16.375 μm in the y direction and 4.62 μm in the z direction.

[0063] Apply a force of 100N to the first driving block 8 and the second driv...

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Abstract

The invention discloses a parallel type three-degree-of-freedom precision micro-motion mechanism of a composite differential branch chain and a working method thereof. The three-degree-of-freedom precision micro-motion mechanism comprises three sets of flexible driving units and an output block, and the output block is located in the center of the three sets of flexible driving units; each set of flexible driving units comprises a piezoelectric ceramic driver and a driving block driven by the piezoelectric ceramic driver, the two sides of the driving block are respectively positioned by a parallelogram flexible hinge structure, and the edges of every two adjacent driving blocks are connected to a middle block through a z-shaped hinge; and each middle block is connected to the output block through a semicircular hinge. The structure has the characteristics of strong bearing capacity and strong anti-interference capacity.

Description

technical field [0001] The invention relates to the technical field of micro-positioning platforms, in particular to a parallel-connected three-degree-of-freedom precision micro-motion mechanism of a compound differential branch chain and a working method thereof. Background technique [0002] Flexible hinge mechanisms are often driven by piezoelectric ceramics, relying on the elastic deformation of the material to achieve a predetermined motion at the output end. Therefore, the flexible hinge mechanism often has the advantages of frictionless transmission and gapless transmission, and can realize precise, efficient, and high-frequency movement of the output end. Based on these advantages, the flexible hinge mechanism has many applications in high-end fields such as micro-nano manufacturing, electron microscopy, and micro-nano gripping. [0003] The existing three-degree-of-freedom translational flexible hinge mechanism mainly includes a parallel type, a series-parallel hyb...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/02H02N2/04
CPCH02N2/028H02N2/04H02N2/043
Inventor 王桂莲吕秉锐朱文达刘利赵文利周海波陈江洋
Owner 合肥名龙电子科技有限公司
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