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High-precision capacitance film vacuum gauge

A high-precision, vacuum gauge technology, applied in vacuum gauges, measuring devices, instruments, etc., can solve the problems of increasing the difficulty of capacitance signal processing, small capacitance value, and affecting the accuracy and sensitivity of capacitance thin film vacuum gauges, so as to achieve the improvement of capacitance value, The effect of increasing the amount of capacitance change and improving accuracy and sensitivity

Inactive Publication Date: 2021-05-25
JIHUA LAB
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  • Summary
  • Abstract
  • Description
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Problems solved by technology

[0004] The capacitance value of the parallel plate capacitor sensing component formed by the pressure-sensitive diaphragm and the fixed electrode of this capacitive thin-film vacuum gauge is very small, which is at the picofarad level, so the capacitance change caused by the pressure change is also very small, thus greatly increasing the capacitance of the capacitance signal. Difficulty in handling, which affects the accuracy and sensitivity of capacitance film vacuum gauges

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Embodiment Construction

[0026] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0027] In describing the present invention, it is to be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Orientation indicated by rear, left, right, vertical, horizontal, top, bottom, inside, outside, clockwise, counterclockwise, etc. The positional relationship is based on the orientation or positional relationship shown in the drawings, which are only for the convenience of describing the present invention and simplifying the description, rather than indicating ...

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Abstract

The invention provides a high-precision capacitance film vacuum gauge, and the vacuum gauge comprises: a housing which is provided with an accommodation cavity; two sensing diaphragms which are arranged in the accommodating cavity in parallel and divide the accommodating cavity into a reference vacuum chamber and two to-be-tested chambers, wherein the two to-be-tested chambers are located on the two sides of the reference vacuum chamber respectively, and the two to-be-tested chambers are communicated with each other and are isolated from the reference vacuum chamber; a connecting pipe which is communicated with one of the to-be-tested chambers; and a fixed substrate which is arranged in the reference vacuum chamber and is parallel to the two sensing diaphragms. Conductive films are arranged on the two sides of the fixed substrate respectively, and the conductive films on the two sides of the fixed substrate and the adjacent sensing diaphragms form capacitors respectively; and the capacitance film vacuum gauge is high in measurement precision and sensitivity.

Description

technical field [0001] The invention relates to the technical field of vacuum detection equipment, in particular to a high-precision capacitive thin-film vacuum gauge. Background technique [0002] Capacitance film vacuum gauge is a kind of vacuum gauge for absolute pressure and total pressure measurement. It has the characteristics of compact structure, high sensitivity, good stability, measurement value has nothing to do with gas composition, strong corrosion resistance and long service life. Core components in semiconductor equipment. [0003] The structure of a general capacitive thin film vacuum gauge is as follows: Figure 4 As shown, it includes a housing 1', a connecting pipe 2', a sensing diaphragm 3', a fixed electrode 4', a suction mechanism 5', a suction port 6' and a corresponding signal conversion circuit, wherein the sensing diaphragm 3' The inner cavity of the housing 1' is divided into a vacuum chamber 7' and a detection chamber 8', the suction mechanism 5'...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L21/00
CPCG01L21/00
Inventor 侯少毅胡琅胡强徐平何斌黎天韵郭远军卫红黄丽玲
Owner JIHUA LAB
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