Imaging sensor image plane parallelism debugging system and method based on microscopic measurement

Abstract

The invention relates to an installation and adjustment method of an imaging sensor, particularly relates to an imaging sensor image plane parallelism debugging system and method based on microscopic measurement, and aims to solve the problems that when the image plane parallelism of an existing imaging sensor is debugged, protective glass is scratched or damaged by a direct measurement method, the debugging precision is poor, the out-of-focus image quality of an imaging measurement method is fuzzy so that accurate calculation is not facilitated, and a workload is large. The debugging system comprises an eccentric instrument air floating platform, a four-dimensional adjusting table, an auxiliary tool, an eccentric instrument imaging microscope and a dial indicator. A to-be-debugged sensor assembly is installed on the four-dimensional adjusting table, and the eccentric instrument imaging microscope is arranged right above the to-be-debugged sensor assembly. The debugging method based on the debugging system comprises the following steps: leveling the eccentric instrument air floating platform; leveling a mounting flange of the to-be-debugged sensor assembly; testing numerical values of three points of the imaging sensor by using the eccentric instrument imaging microscope, and calculating a deviation value; and correcting the thickness of a cushion column according to the deviation.

Description

technical field [0001] The invention relates to an installation and adjustment method of an imaging sensor, in particular to an imaging sensor image plane parallelism debugging system and method based on eccentricity meter microscopic measurement. Background technique [0002] Imaging sensors include CMOS, CCD, etc., which are installed at the back end of the optical lens of the star sensor to image the star target. The photosensitive image surface of the imaging sensor should be perpendicular to the optical axis in theory, and the imaging quality can be guaranteed only with a high installation accuracy index. with precision. [0003] The image surface of the imaging sensor is generally square or rectangular. The optical lens of the star sensor requires that the imaging quality must be guaranteed at each position of the image surface of the imaging sensor in different fields of view. For an optical lens with a large numerical aperture, the inclination of the image plane of ...

AI Technical Summary

Problems solved by technology

[0007] The purpose of the present invention is to solve the problem that the direct measurement method will scratch or damage the protective glass when debugging the parallelism of the image plane of the existing imaging sensor, and the non-parallel of the protective glass and the image plane leads to poor debugging accuracy, while the imaging measurement method has a large inclination Due to the blurred image quality when out of focus, which is not conducive to accurate calculation, and the technical problems of large debugging workload, a system and method for debugging the image plane parallelism of imaging sensors based on microscopic measurement are proposed. Based on the microscopic measurement technology of eccentricity meter, only the debugging sensor Components are measured, realizing non-contact measurement and digital measurement, greatly improving the efficiency of assembly and debugging, and ensuring batch quality

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