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Gas detection system based on MEMS gas sensor array

A gas detection system, gas sensor technology, applied in the direction of material resistance, etc., can solve the problem of gas detection system without MEMS gas sensor array

Active Publication Date: 2021-04-30
UNIV OF SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, these circuits can be used in experimental instruments or gas detection systems for resistance frequency conversion, but there is currently no gas detection system with such an integrated digital output MEMS gas sensor array

Method used

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  • Gas detection system based on MEMS gas sensor array
  • Gas detection system based on MEMS gas sensor array
  • Gas detection system based on MEMS gas sensor array

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Embodiment Construction

[0039] The following will clearly and completely describe the embodiments of the present application with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, not all of them. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.

[0040] In order to make the above objects, features and advantages of the present application more obvious and comprehensible, the present application will be further described in detail below in conjunction with the accompanying drawings and specific implementation methods.

[0041] refer to figure 1 , figure 1 A schematic structural diagram of a gas detection system based on a MEMS gas sensor array provided by an embodiment of the present invention. Such as figure 1 As shown, the g...

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Abstract

The invention discloses a gas detection system based on an MEMS gas sensor array. The gas detection system comprises the MEMS gas sensor array, a time division multiplexing multi-channel resistance frequency conversion circuit, a programmable heater circuit, an EEPROM, a trimmable on-chip oscillator, a power-on self-reset circuit and a digital control circuit. The MEMS gas sensor array comprises a plurality of gas sensors; the gas sensor comprises a heater resistor and a gas sensitive material resistor; the MEMS gas sensor array is used for converting gas information in the environment into resistance change of the gas sensitive material; the multi-channel resistance frequency conversion circuit is used for converting the resistance value of the gas sensitive material of the selected channel into a square wave signal with a corresponding frequency; and the on-chip oscillator is used for generating a stable clock signal required by the system. By applying the technical scheme provided by the invention, the working voltage and the circuit power consumption can be reduced, and the detection range and the detection precision of the gas sensitive material resistor in the gas sensor are improved.

Description

technical field [0001] The invention relates to the field of semiconductor integrated circuits, in particular to a gas detection system based on a MEMS gas sensor array. Background technique [0002] Odor recognition technology has a wide range of application requirements in smart terminals, environmental monitoring and other fields. Currently, gas detection uses instruments such as mass spectrometers, gas chromatographs and Fourier transform infrared spectrometers, but these systems are bulky, expensive and complex. In recent years, people are increasingly concerned about environmental quality and safety, so the demand for portable, low-cost and low-power gas sensing systems is increasing year by year. [0003] The gas detection system consists of a gas sensor or a gas sensor array, and an interface circuit. Currently, readout circuits based on resistance-to-frequency translation (RTF) circuits are widely used due to their simple design, high dynamic range, and good linea...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/12
CPCG01N27/12
Inventor 许磊谷文先祁伟杰王晶
Owner UNIV OF SCI & TECH OF CHINA
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