Channel type vacuum standard leak hole detection device and method

Abstract

The invention relates to a channel type vacuum standard leak hole detection device which comprises an air source, a pressure stabilizing cavity, a molecular pump, a mechanical pump and an air storage tank. The vacuum end of the detected channel type vacuum standard leak hole is connected with the pressure stabilizing cavity, and the atmospheric end is simultaneously communicated with a gas flow meter group, a first soap film flow meter and a second soap film flow meter; the lowest detection flow in the flow meter group is greater than that of the first soap film flow meter, and the detection flow of the first soap film flow meter is greater than that of the second soap film flow meter; the voltage stabilizing cavity is respectively communicated with a group of capacitive film vacuum gauges with pressure values from low to high in a cut-off manner; the pressure stabilizing cavity is respectively communicated with the molecular pump and the mechanical pump in a cut-off manner; the pressure stabilizing cavity is communicated with the gas in a cut-off manner; the molecular pump is communicated with the gas storage tank; and the molecular pump, the gas storage tank and the mechanical pump are communicated in a disconnectable manner. The device can adapt to leakage rate detection of leak holes in all set pressure ranges, and is convenient to test, high in universality and high in measurement precision.

Description

technical field [0001] The invention relates to a channel-type vacuum standard leak detection device and method, belonging to the technical field of leak detection. Background technique [0002] A leak is a hole, pore, permeable element, or other structure in the wall of an enclosure that allows gas to pass from one side of the wall to the other under the action of a pressure or concentration difference. A standard leak is a calibration leak of which the leak rate is known under specified conditions. Standard leaks can be divided into permeable standard leaks and channel-type standard leaks according to the way the gas passes through the leakage element. The channel-type standard leak is the standard for measuring the leak rate of air-tightness testing equipment. It can be used to calibrate the air-tightness leak detector, The flow tester can be used as equipment spot check, accuracy confirmation, etc. to ensure the accuracy of the operation of air tightness testing equipme...

AI Technical Summary

Problems solved by technology

[0003] At present, there is no calibration device and method in the prior art to detect channel-type vacuum standard leaks, resulting in the user being unable to accurately know the accuracy of channel-type vacuum standard leaks. Therefore, the detection method of channel-type vacuum standard leaks is studied. , it is necessary to develop a channel-type vacuum standard leak calibration device

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