Measuring system and measuring method

Abstract

The invention discloses a measuring system and a measuring method. The system comprises an optical fiber laser, a first optical fiber beam splitter, a time delayer and a detector. The optical fiber laser generates a pulse light beam, and the first optical fiber beam splitter splits the pulse light beam into pump light and probe light. The time delayer enables the delay time between the pump lightand the probe light to be adjustable. And the two paths of light are finally emitted into an object to be measured. The detector is used for obtaining signal light formed by reflection of the detection light through the to-be-detected object in multiple different delay time, and obtaining detection information according to the signal light. Therefore, the photoacoustic measurement of the to-be-measured object is realized by using the measurement system. Part of optical paths in the system are realized through optical fibers, the optical paths of the optical fibers have the advantages of softness, randomly changeable shapes, long transmission distance and suitability for various severe environments with strong electromagnetic interference, flammability, explosiveness and the like, and the stability and the anti-interference capability of the system are improved. Tedious work such as collimation adjustment and the like is omitted in an optical fiber light path, the device adjustment convenience in the measurement process is improved, and the test time is shortened.

Description

technical field [0001] The present application relates to the field of measurement technology, in particular to a measurement system and a measurement method. Background technique [0002] Photoacoustic film thickness measurement is a precise optical measurement technology. The film thickness measurement range is 50A ~ 10um, and the accuracy can reach 0.1A. In the prior art, the spatial optical path is used to measure the film thickness, but the adjustment of the spatial optical path is cumbersome. For example, if one device is fine-tuned, other devices must be adjusted accordingly, otherwise the precision and accuracy will be seriously affected. In this way, the labor cost is large and the test time is long. In addition, the spatial optical path is susceptible to interference, and it is difficult to implement measurement in an environment with strong electromagnetic interference or inflammable and explosive environments, resulting in poor stability of the measurement syste...

AI Technical Summary

Problems solved by technology

In the prior art, the spatial optical path is used to measure the film thickness, but the adjustment of the spatial optical path is cumbersome. For example, if one device is fine-tuned, other devices must be adjusted accordingly, otherwise the precision and accuracy will be seriously affected.

In this way, the labor cost is high and the test time is long

In addition, the spatial optical path is susceptible to interference, and it is difficult to implement measurement in environments with strong electromagnetic interference or inflammable and explosive environments, resulting in poor stability of the measurement system and weak anti-interference ability

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