Particle transferring and accumulating equipment of wafer pouring machine

A technology of film rewinding machine and equipment, which is applied in the field of film rewinding machines, can solve the problems of scratches and other problems, and achieve the effects of improving work efficiency, reducing scratches, and flexible use

Pending Publication Date: 2021-03-12
中环领先半导体材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The existing film rewinder is manual rewinding, turning the silicon wafer 180° to deposit chips, and scratches will occur during the process of rewinding. In order to improve the degree of automation and work efficiency, reduce the occurrence of scratches

Method used

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  • Particle transferring and accumulating equipment of wafer pouring machine
  • Particle transferring and accumulating equipment of wafer pouring machine
  • Particle transferring and accumulating equipment of wafer pouring machine

Examples

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Embodiment Construction

[0018] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0019] see Figure 1-4 , the present invention provides a technical solution: a kind of transfer storage device for rewinding machine, comprising a fixed frame 6, a storage machine body 7 and a workbench 1, the fixed frame 6 is fixedly installed with a storage machine body 7, and the fixed frame 6 The workbench 1 is fixedly installed on the upper surface of the bottom wall, and the sliding mechanism 2 is fixedly installed on the upper surface of the workbench ...

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Abstract

The invention discloses transferring and accumulating equipment of a wafer pouring machine. The equipment comprises a fixing frame, a particle accumulation machine body and a workbench, the particle accumulation machine body is fixedly mounted in the fixing frame, the workbench is fixedly mounted on the upper surface of the bottom wall of the fixing frame, a sliding mechanism is fixedly mounted onthe upper surface of the workbench, and the sliding mechanism comprises a bottom plate; baffles are fixedly connected to the two ends of the upper surface of the bottom plate, the inner sides of thebaffles are fixedly connected with the two ends of a sliding rod, the circumferential side of the sliding rod penetrates through the movable table in a sliding connection mode, the inner sides of thebaffles are fixedly connected with one ends of pneumatic telescopic rods, the other ends of the pneumatic telescopic rods are fixedly inserted into the movable table, a first air pipe is arranged at one side of the baffle, the first air pipe is communicated with a pneumatic telescopic rod, a limiting sliding rail is fixedly installed on one side of the baffle, the limiting sliding rail is connected with a limiting sliding block in a sliding mode, silicon wafers are adsorbed and grabbed through adsorption holes in a clamping plate, manual grabbing is avoided, and scratching to the silicon wafers is reduced.

Description

technical field [0001] The invention relates to the technical field of film rewinders, in particular to a transfer and storage device for film rewinders. Background technique [0002] With the continuous advancement of integrated circuit manufacturing technology, the volume of silicon wafers is getting smaller and smaller, which also leads to very small particles becoming enough to affect the manufacturing and performance of silicon wafers; [0003] The existing film rewinder is manual rewinding, turning the silicon wafers 180° to deposit chips, and scratches will occur during the process of rewinding. In order to improve the degree of automation and work efficiency, reduce the occurrence of scratches. [0004] For this reason we propose a kind of rewinding machine's transfer saving device to be used for solving the above-mentioned problem. Contents of the invention [0005] The object of the present invention is to provide a device for transferring and accumulating pell...

Claims

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Application Information

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IPC IPC(8): H01L21/683H01L21/677
CPCH01L21/67793H01L21/683
Inventor 邢子淳孙晨光王彦君陈健华
Owner 中环领先半导体材料有限公司
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