A gravity-driven spatially resolved powder atomic layer deposition equipment, method and application

Abstract

The invention belongs to the technical field of atomic layer deposition, and discloses a gravity-driven spatial resolution powder atomic layer deposition equipment, method and application. The powder atomic layer deposition equipment is provided with a heatable main cavity; the multi-stage heatable main cavity There is a movable sealing structure between them, and it is sealed by rubber-metal / rubber; each stage of the heatable main cavity is fixed with a heatable gas pipeline at both ends, and a powder filter is installed at the connection; each stage of the heatable One end of the main chamber is connected to the precursor and the carrier gas through a heatable gas pipeline, and the switch is controlled by a solenoid valve; the other end of each stage of the heatable main chamber is connected to a vacuum pump through a heatable gas pipeline, and is controlled by an electromagnetic or pneumatic valve. The control switch can be equipped with a residual gas analyzer or a vacuum gauge at both ends of the valve; the whole equipment can be equipped with a vibrator. The invention adopts a continuous growth mode to design the cavity, which obviously improves the coating efficiency and reduces the cost of the powder coating.

Description

technical field [0001] The invention belongs to the technical field of atomic layer deposition, and in particular relates to a gravity-driven space resolution powder atomic layer deposition equipment, method and application. Background technique [0002] At present, electrode materials in energy fields such as lithium batteries and hydrogen energy batteries are usually powders. A large number of literatures have reported that the surface coating modification of powder electrode materials by ALD can delay the appearance of dendrites and prolong the service life of batteries. A large number of laboratory-level powder surface coating technologies have been reported, but in principle, it is still immature for large-scale industrial production, because powder samples are usually easy to agglomerate, and the pressure of the precursor is not high. Even through traditional fluidized bed and other solutions, it is difficult to achieve High coverage. For the existing fluidized bed po...

AI Technical Summary

Problems solved by technology

[0004] (1) The existing technology cannot avoid opening the cavity to inject samples, which wastes time and increases the cost of coating

[0005] (2) When increasing the efficiency in the prior art, it is necessary to increase the cavity volume and increase the purge time

[0006] (3) Sample agglomeration is prone to occur in the prior art, resulting in reduced film coverage

[0007] The difficulty of solving the above problems and defects is: how to improve the growth efficiency of the film in the existing technology; it is impossible to avoid the steps of cooling down, opening the cavity, taking out the sample, and putting in the sample to cause a lot of time waste

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