Application of silica sol in field of microelectronics
A silica sol and microelectronics technology, applied in the field of microelectronics, can solve problems such as restrictions, dependence on imports of silica sol, and product performance that cannot meet the production needs of the microelectronics field, so as to reduce the risk of pollution, reduce the content of large particles in products, and reduce pollution. effect of chance
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[0012] The present invention will be described in detail below with reference to specific embodiments.
[0013] A kind of application of silica sol in the field of microelectronics, the silica sol is produced by Hubei Jinwei New Materials Co., Ltd., the raw material in the silica sol is Australian sand, and the company's production technology patent is adopted, and it is produced under closed automatic conditions ; Filling and packaging under 1000-level dust-free conditions; 0.2 micron filtration system is used for filtration. The production technology patents include the patent number 2019203478070, the invention-creation title of "A new type of reaction kettle for the production of silica sol" and the patent number 2015210184779, the invention-creation title of "A novel structure of nano-silica sol". technology.
[0014] Both the particle size distribution and the speed of the silica sol produced by the above process are used in the microelectronic multilayer wiring CMP to ...
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