Area array point scanning light-splitting white-light interferometer
A white light interferometer and point scanning technology, applied in the field of optical instruments, can solve the problems of uneven energy, misjudgment of detection results, inability to receive reflected light, etc., and achieve the effect of good energy uniformity
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Embodiment 1
[0065] Such as Figure 1-4 As shown, the SLD light source uses a near-infrared broadband light source with a power of 25mw and a wavelength of 810-870nm; the isolator uses an 850nm broadband isolator; the coupler is an X-type single-mode fiber coupler, the numerical aperture of the fiber is 0.13, the core diameter is 5um, and the splitting ratio is 50 : 50; collimator adopts diffractive polar achromatic lens, focal length is 18.45mm; beam splitting prism splitting ratio is 50:50; third lens is achromatic lens with focal length 50mm; mirror is coated with near-infrared high reflection film, reflectivity >99.5% ;The XY scanning galvanometer has an effective incident spot diameter of 7mm and a maximum scanning angle of 5 degrees; the grating is a 1800lp transmission grating with a blaze angle of 49.2 degrees@840nm; the first lens and the second lens use the same achromatic telecentric lens, and the field of view angle is 10 degrees , the focal length is 83.9mm; the pixel size of ...
Embodiment 2
[0068] Such as Figure 10 As shown, compared with Embodiment 1, the remaining modules remain unchanged, and only the fourth lens is replaced to achieve different scanning ranges and different depths of field. The fourth lens has a field of view of 28 degrees, a focal length of 70mm, and an entrance pupil diameter of 5mm. The scanning field of view is 24.4*24.4mm, and the depth of field is 0.67mm.
[0069] Such as Figure 11 as shown, Figure 11 It is the MTF curve of the fourth lens of this embodiment, which basically reaches the diffraction limit level and has high resolution.
Embodiment 3
[0071] Such as Figure 12 As shown, compared with Embodiment 1, the remaining modules remain unchanged, and the fourth lens is replaced to achieve different scanning ranges and different depths of field. The fourth lens has a field of view of 28 degrees, a focal length of 100mm, and an entrance pupil diameter of 5mm. The scanning field of view is 34.9*34.9mm, and the depth of field is 1.36mm.
[0072] Such as Figure 13 as shown, Figure 13 It is the MTF curve of the fourth lens in Example 3, which basically reaches the diffraction limit level and has high resolution.
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