Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Anti-gas interference type MEMS gas sensor and preparation method thereof

A gas sensor and gas technology, applied in the direction of instruments, scientific instruments, material resistance, etc., can solve the problems of thermal sensor gas cross interference, etc., to avoid influence and improve accuracy

Pending Publication Date: 2021-01-01
TIANDI CHANGZHOU AUTOMATION +1
View PDF0 Cites 4 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problem of gas cross-interference in thermal sensors in the related art, the application provides an anti-gas interference MEMS gas sensor and its preparation method

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Anti-gas interference type MEMS gas sensor and preparation method thereof
  • Anti-gas interference type MEMS gas sensor and preparation method thereof
  • Anti-gas interference type MEMS gas sensor and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0039] Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, the same numerals in different drawings refer to the same or similar elements unless otherwise indicated. The implementations described in the following exemplary examples do not represent all implementations consistent with the present invention. Rather, they are merely examples of apparatuses and methods consistent with aspects of the invention as recited in the appended claims.

[0040] The principle of gas concentration sensing by thermal conductivity is: sensitive materials are semiconductors, metal oxides, polymers, etc. whose conductivity / resistivity changes with temperature. Heat the sensitive material to a certain temperature, contact with the gas to be measured, and the gas will change the temperature of the sensitive material through heat conduction, resulting in...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
Viscosityaaaaaaaaaa
Viscosityaaaaaaaaaa
Surface tensionaaaaaaaaaa
Login to View More

Abstract

The invention discloses an anti-gas interference type MEMS gas sensor and a preparation method thereof. The method comprises the following steps of depositing and forming a metal electrode layer on the surface of an oxide layer; depositing an insulating layer on the surface of the metal electrode layer by using a chemical vapor deposition method; depositing a gas sensitive material layer on the surface of the insulating layer; depositing a layer of separation membrane on the surface of the gas sensitive material layer in a coating or printing manner, wherein the pore diameter of a nano channelof the separation membrane is smaller than the motion diameter of interference gas molecules. When the MEMS gas sensor is manufactured, the separation membrane is added, and the pore diameter of thenano channel of the separation membrane is smaller than the movement diameter of interference gas molecules, so that the interference gas molecules collide in quantity in the nano channel of the separation membrane and cannot pass through the separation membrane, and the interference gas is blocked; the influence of interference gas on sensitive materials in the sensor is avoided, the accuracy ofa thermal sensor is improved, and the selectivity of the thermal sensor to target gas is better.

Description

technical field [0001] The invention belongs to the technical field of gas sensors, and relates to an anti-gas interference type MEMS gas sensor and a preparation method. Background technique [0002] With the technological advancement and process maturity of sensing technology, gas sensor technology is becoming more and more popular and applied. Gas sensor technology is a sensing technology that converts gas type and concentration signals into electrical signals and outputs them through readable digital signals. According to its induction principle, it can be divided into: catalytic combustion type, electrochemical type, infrared type, thermal conductivity type, semiconductor type, metal oxide type, solid electrolyte type, etc. The thermal gas sensor has the advantages of large detection range, good broad spectrum, long service life, and low price. It is widely used in the detection of methane, hydrogen, and helium in military, industrial, medical, petrochemical, and semic...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G01N27/04
CPCG01N27/041
Inventor 周李兵贺耀宜郝叶军张清胡文涛王小蕾张一波赵立厂陈珂黄小明
Owner TIANDI CHANGZHOU AUTOMATION
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products