Anti-gas interference type MEMS gas sensor and preparation method thereof
A gas sensor and gas technology, applied in the direction of instruments, scientific instruments, material resistance, etc., can solve the problems of thermal sensor gas cross interference, etc., to avoid influence and improve accuracy
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[0039] Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, the same numerals in different drawings refer to the same or similar elements unless otherwise indicated. The implementations described in the following exemplary examples do not represent all implementations consistent with the present invention. Rather, they are merely examples of apparatuses and methods consistent with aspects of the invention as recited in the appended claims.
[0040] The principle of gas concentration sensing by thermal conductivity is: sensitive materials are semiconductors, metal oxides, polymers, etc. whose conductivity / resistivity changes with temperature. Heat the sensitive material to a certain temperature, contact with the gas to be measured, and the gas will change the temperature of the sensitive material through heat conduction, resulting in...
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