A two-dimensional nanopositioning platform
A positioning platform, two-dimensional nanotechnology, used in instruments, measuring devices, scanning probe microscopy, etc., can solve the problem of difficult to achieve grid scanning speed, achieve high-speed positioning, increase grid scanning frequency, high basic Effect of Resonant Frequency
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[0044] In order to make the object of the present invention, the technical solution and advantages more clearly understood, the following in conjunction with the accompanying drawings and embodiments, the present invention will be further elaborated in detail. It should be understood that the specific embodiments described herein are merely used to explain the present invention and are not intended to qualify the present invention. Further, the technical features involved in the various embodiments of the present invention described below may be combined with each other as long as they do not constitute a conflict with each other.
[0045] Embodiments of the present application provide a two-dimensional nanolocation platform, such as Figure 1As shown, the two-dimensional nano positioning platform includes a motion platform 1 and a platform substrate 2 and a drive device. Wherein, the motion platform 1 is disposed in the center of the upper surface of the platform substrate 2, for ...
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