Curvature sensor based on paper folding structure

Abstract

The invention provides a curvature sensor based on a paper folding structure. The curvature sensor comprises a flexible substrate (1), a metal pole plate (2), a first clamped beam anchor region (31),a second clamped beam anchor region (32), a double-end clamped beam (4) with a folding film structure,a first folding film structure (52), a second folding film structure (53), a third folding film structure (51), a fourth folding film structure (54) and a planar inductor (6). When the flexible substrate is attached to the surface of a concave curvature, due to the fact that the folding film structure based on the paper folding principle is adopted, the double-end clamped beam is folded to form a downwards-protruding three-dimensional structure, the capacitance change amount between the double-end clamped beam and the metal pole plate is increased. Therefore, the curvature sensor has the advantages of high sensitivity, small measurement error, process compatibility, novel structure and thelike.

Description

technical field [0001] The invention relates to a curvature sensor based on an origami structure, which belongs to the technical field of microelectronic devices. Background technique [0002] At present, there are three main methods for measuring the curvature. One is to use the change of the resistance value of the film material during the elongation or compression of the material to measure the degree of bending. The stability of the device is poor and the cost is relatively high; the second is to use the measurement The light intensity change after the fiber is bent is used to measure the degree of bending. The equipment is more complicated, not easy to carry, and the cost is too high; the third is to measure the degree of bending based on the change of capacitance during the bending process, and the sensitivity of this type of device is relatively low. . In recent years, with the continuous development of science and technology, it has become a development trend to stu...

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Problems solved by technology

[0002] At present, there are three main methods for measuring the curvature. One is to use the change of the resistance value of the film material during the elongation or compression of the material to measure the degree of bending. The stability of the device is poor and the cost is relatively high; the second is to use the measurement The light intensity change after the fiber is bent is used to measure the degree of bending. The equipment is more complicated, not easy to carry, and the cost is too high; the third is to measure the degree of bending based on the change of capacitance during the bending process, and the sensitivity of this type of device is relatively low.

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