Overturning device and vacuum coating equipment

A technology of a flipping device and a pivot shaft, which is applied in the field of vacuum coating supporting equipment, can solve the problems of difficult control of the flipping action of the cover plate, inability to effectively brake safety, hidden dangers, etc.

Pending Publication Date: 2020-10-30
紫石能源有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The main purpose of the present invention is to provide an overturning device and vacuum coating equipment to solve the problem that the overturning action of the cover plate of the vacuum coating equipment in the prior art is difficult to control and cannot be effectively braked, resulting in certain potential safety hazards

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  • Overturning device and vacuum coating equipment
  • Overturning device and vacuum coating equipment
  • Overturning device and vacuum coating equipment

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Embodiment Construction

[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. The following description of at least one exemplary embodiment is merely illustrative in nature and in no way taken as limiting the invention, its application or uses. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0028] In order to solve the problem that the overturning action of the cover plate of the vacuum coating equipment in the prior art is difficult to control and cannot be effectively braked, so there is a certain potential safety hazard, the present invention provides a turning device an...

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Abstract

The invention provides an overturning device. The overturning device comprises a supporting frame, a bearing structure, pivot shafts, a drive mechanism and a brake mechanism. The bearing structure isused for mounting components. The pivot shafts comprise the first pivot shaft and the second pivot shaft. The bearing structure is rotationally arranged on the supporting frame through the first pivotshaft and the second pivot shaft. The drive mechanism is arranged on the supporting frame and located at the position of the first pivot shaft, and the drive mechanism is in drive connection with thefirst pivot shaft to drive the bearing structure to be overturned. The brake mechanism is arranged on the supporting frame and located at the position of the second pivot shaft, when the rotation angle acceleration of the pivot shafts is higher than a preset value, a brake part of the brake mechanism moves to limit rotation of the second pivot shaft, and therefore the overturning action of the bearing structure is emergently braked. The problems that in the prior art, the overturning action of a cover plate of vacuum coating equipment is difficult to control and cannot be effectively braked,so that certain potential safety hazards exist are solved.

Description

technical field [0001] The invention relates to the technical field of vacuum coating supporting equipment, in particular to a turning device for turning over a cover plate in a vacuum chamber of a vacuum coating equipment. Background technique [0002] The vacuum chamber of the vacuum coating equipment is usually equipped with a cover plate, which is used to carry and install various components, and in order to ensure the practicability of the vacuum coating equipment, components need to be installed on both sides of the cover plate. The installation of the device requires that the cover plate can be turned over. [0003] However, the structure size and weight of the cover plate of the vacuum coating equipment in the prior art are relatively large, and it has a large moment of inertia during the flipping process. Once the cover plate loses control, it is easy to accidentally injure the operation by quickly flipping it under the action of its own gravity. Therefore, there a...

Claims

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Application Information

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IPC IPC(8): C23C14/22
CPCC23C14/22
Inventor 么曼实
Owner 紫石能源有限公司
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