Liquid medicine mixing device and liquid medicine mixing and water supplementing system

Abstract

The invention discloses a liquid medicine mixing device and a liquid medicine mixing and water supplementing system. The liquid medicine mixing device comprises: a liquid medicine tank, wherein the top of the liquid medicine tank is provided with a liquid medicine inlet, a water supplementing port and a liquid medicine circulating inlet, and the bottom of the liquid medicine tank is provided witha liquid medicine outlet; a liquid medicine supply pipeline, wherein the outlet end of the liquid medicine supply pipeline is connected with the liquid medicine inlet, the inlet end is connected witha liquid medicine supply end, and a first valve is arranged on the liquid medicine supply pipeline; a water supplementing pipeline, wherein the outlet end of the water supplementing pipeline is connected with a water supplementing port, the inlet end is connected with a water supplementing end, and a second valve is arranged on the water supplementing pipeline; a liquid medicine output pipeline, wherein the inlet end of the liquid medicine output pipeline is connected with a liquid medicine outlet, the outlet end is connected with a product cleaning end, and the liquid medicine output pipelineis provided with a circulating pump and a third valve and located on the downstream of the circulating pump; a liquid medicine mixing pipeline, wherein the inlet end of the liquid medicine mixing pipeline is communicated with the liquid medicine output pipeline between the circulating pump and the third valve, the outlet end of the liquid medicine mixing pipeline is communicated with the liquid medicine circulating inlet, and a liquid medicine mixing element is arranged on the liquid medicine mixing pipeline; and a concentration detection unit used for detecting the concentration of the liquid medicine in the liquid medicine tank. Sufficient mixing of the water-supplemented cleaning liquid medicine can be realized.

Description

technical field [0001] The invention relates to the technical field of semiconductors, and more specifically, to a medicinal liquid mixing device and a medicinal liquid mixing water supply system. Background technique [0002] In the field of integrated circuit cleaning, for different cleaning objects and nano-nodes of integrated circuit products, it is necessary to select the corresponding cleaning liquid. Some liquids will be discharged after a single use, while others need to be reused. [0003] For the repeatedly used chemical solution, the cleaning process has higher requirements on the water content index. With the repeated spraying and recovery of the chemical solution, the water in the chemical solution will flow in the cycle, resulting in a decrease in the water content. When the water content is not within the specified allowable range When it is used, it will directly affect the cleaning effect of the liquid medicine and the pump speed of the circulation pipeline,...

AI Technical Summary

Problems solved by technology

[0003] For the repeatedly used chemical solution, the cleaning process has higher requirements on the water content index. With the repeated spraying and recovery of the chemical solution, the water in the chemical solution will flow in the cycle, resulting in a decrease in the water content. When the water content is not within the specified allowable range It will directly affect the cleaning effect of the liquid medicine and the pump speed of the circulation pipeline, and will have an adverse effect on the cleaned product and the equipment itself.

[0004] In the existing technology, the liquid medicine and water are directly injected into the liquid medicine tank from the factory service end, and are mixed for use in the process. For some chemical liquids with high viscosity and poor hydrophilicity, uneven mixing is likely to occur, and even lead to detection by the concentration meter. Deviation, which directly affects the process effect

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