Hexaaryl bis-imidazole photoinitiator and application thereof
A technology of hexaarylbisimidazole and photoinitiator, applied in optics, optical components, optomechanical equipment, etc., can solve problems such as non-compliance with application requirements, inability to effectively reduce development waste, inverted trapezoid, etc.
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[0016] Based on the purpose of the present invention, various aspects are described in more detail below.
[0017] The terms "sludge" and "developer litter" as used herein refer to material that accumulates in the developer solution, which is insoluble in the developer solution and redeposits on the developed substrate, thereby reducing the efficiency of the developer solution.
[0018]
[0019] As mentioned above, the hexaarylbisimidazole photoinitiator of the present invention is prepared through the following steps:
[0020] (1) Aromatic aldehydes represented by general formula (I) and aromatic aldehydes represented by general formula (II) undergo condensation and oxidation reactions to obtain benzil compounds; The aromatic aldehyde shown generates monoimidazole compound M by ring-forming reaction;
[0021] (2) aromatic aldehydes shown in general formula (Ⅳ) and aromatic aldehydes shown in general formula (Ⅴ) are through condensation, oxidation reaction, obtain benzil co...
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