A Surface Shape Detection Method Based on Random Two-step Phase Shift

A surface shape detection and phase shifting technology, applied in the field of optical detection, can solve the problems of large measurement error and harsh measurement environment, and achieve good robustness, high measurement accuracy and simple experimental operation

Active Publication Date: 2021-07-02
XIAN TECH UNIV
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Problems solved by technology

[0004] The purpose of the present invention is to provide a surface shape detection method based on random two-step phase shift, so as to solve the problems of demanding measurement environment and large measurement errors in the prior art

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  • A Surface Shape Detection Method Based on Random Two-step Phase Shift
  • A Surface Shape Detection Method Based on Random Two-step Phase Shift
  • A Surface Shape Detection Method Based on Random Two-step Phase Shift

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Embodiment Construction

[0035] The present invention will be described in detail below with reference to the drawings and embodiments.

[0036] see figure 1 , a surface shape detection method based on a random two-step phase shift, which specifically includes the following steps:

[0037] (1) Obtain a random two-step phase shift interferogram by building a Fizeau interference test optical path, and store it in the computer;

[0038] (2) Using a random two-step phase-shift algorithm, the two phase-shifted interferograms I 1 , I 2 For phase demodulation, the random two-step phase shift algorithm process can be found in figure 2 , see the principle image 3 ,Specific steps are as follows:

[0039] ① According to the interferogram I 1 , I 2 The light intensity expression of the phase to be measured is eliminated, and I can be obtained 1 , I 2 between new expressions:

[0040] 0=P(x,y)-[I' 2 (x,y) sin 2 (δ)-2I 0 2 (x,y)(1-cosδ)]

[0041] -Q(x,y)I 0 (x,y)(1-cosδ)-R(x,y)cosδ

[0042] Among...

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Abstract

A surface shape detection method based on a random two-step phase shift belongs to the technical field of optical detection. The invention aims to solve the problems of strict requirements on the measurement environment and large measurement errors in the prior art. The technical solution provided by the present invention is: randomly obtain two-step phase-shifted interferograms, and carry out phase demodulation on these two interferograms through a random two-step phase-shift algorithm; carry out phase unpacking to the demodulated phase diagrams, and use Zernike Polynomials are used to fit the wave surface to solve the surface shape to be measured. The invention only needs two random interferograms to solve the surface shape of the surface to be measured, reduces the complexity of the measurement system, reduces the calculation time for extracting the phase shift amount or recovering the phase, and has simple operation and high measurement accuracy.

Description

Technical field: [0001] The invention relates to the technical field of optical detection, in particular to a surface shape detection method based on random two-step phase shift. Background technique: [0002] Optical surface shape detection is one of the most important and basic detection items in optical parts detection. It will directly affect the quality of optical parts, and it is also an important symbol of the level of optical detection. Therefore, research on optical surface shape detection is carried out. is of great significance. [0003] The most typical detection method is the phase-shift interferometry, but the high-precision measurement method represented by the phase-shift interferometry technology often uses a four-step phase-shift algorithm or an equal-step algorithm to demodulate the phase of the interference fringes. The environmental requirements are very strict: the phase shift steps must be strictly equidistant or fixed, and environmental vibration and...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 朱学亮李靓田爱玲王红军刘丙才万鑫
Owner XIAN TECH UNIV
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