Blue light band asymmetric metamaterial polarization modulator and manufacturing method thereof

Abstract

The invention discloses a blue light band asymmetric metamaterial polarization modulator. A second metal grating layer is prepared on the top surface of a silicon-based layer through an electron beamevaporation deposition method and an electron beam etching process; a second low-refractive-index dielectric material layer is prepared on the top surface of the second metal grating layer through anelectron beam evaporation deposition method; a graphical high-refractive-index dielectric material polarization conversion layer is prepared on the top surface of the second low-refractive-index dielectric material layer through an electron beam evaporation deposition method and an electron beam etching process; a first low-refractive-index dielectric material layer is formed on the top surface ofthe patterned high-refractive-index dielectric material polarization conversion layer through an electron beam evaporation deposition method, and a first metal grating layer is formed on the top surface of the first low-refractive-index dielectric material layer through the electron beam evaporation deposition method and an electron beam etching process; according to the invention, the problems of low transmissivity and low polarization conversion rate can be solved, and the device can also realize a bidirectional asymmetric transmission function.

Description

technical field [0001] The invention belongs to the technical field of micro-nano optics application, and in particular relates to a blue-ray band asymmetric metamaterial polarization regulator and a manufacturing method thereof. [0002] technical background [0003] Polarization state is one of the important characteristic parameters of electromagnetic waves. As early as 1808, Marius discovered the polarization of light in experiments. Polarization is one of the important characteristic parameters of transverse electromagnetic waves. The regulation of the polarization state of electromagnetic waves has positive and potential significance in many fields such as polarization imaging detection, quantum communication, and biomolecular detection. Polarization control is achieved by means of metamaterials, among which anisotropic metamaterials or chiral structures without mirror symmetry have excellent performance and application prospects. For example, the selection of the pol...

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Problems solved by technology

[0007] The purpose of the present invention is to address the above technical problems, to provide a blue light band asymmetric metamaterial polarization modulator and its manufacturing method, the present invention can solve the problem of small transmittance (in the blue light band, the absorption of metal is relatively large, and the property is unstable), The problem of low polarization conversion rate, at the same time, the device can also realize the function of bidirectional asymmetric transmission

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