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A system, method and application for improving the uniformity of pCVD raw material gas deposition

A technology of raw material gas and uniformity, applied in the direction of manufacturing tools and glass manufacturing equipment, etc., can solve the problems of the effective rod length of the preform, insufficient preheating of the gas raw material, and increase the cost of the optical fiber to ensure deposition uniformity and automation High degree of operation and reduction of cost for rod making

Active Publication Date: 2021-05-07
FENGHUO COMM SCI & TECH CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This method does not fully preheat the gas material, and the extension tube increases the cost of the optical fiber
U.S. Patent US2009 / 0022906 discloses moving the holding furnace along the axial direction of the liner. This method can improve the uniformity of the preform, but it will affect the effective rod length of the preform and increase the cost of the optical fiber.
And this method equipment is more complex

Method used

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  • A system, method and application for improving the uniformity of pCVD raw material gas deposition
  • A system, method and application for improving the uniformity of pCVD raw material gas deposition
  • A system, method and application for improving the uniformity of pCVD raw material gas deposition

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Embodiment 1

[0087] The PCVD deposition system and method provided in this embodiment are the same as Comparative Example 2, except that in step S4, the actual output power of the microwave generator 4 in the gas end area 20 is set to 5.5kw, and the pump end area 22 The actual output power of the microwave generator 4 is set to 5.0kw. At the same time, the actual output power of the microwave generator 4 in the middle end area 21 is maintained at a preset output power of 7.0 kw.

[0088] During the material gas deposition process, it was observed in this embodiment that there was atomization on the inner surface of the gas end region 20 of the liner 2, which was caused by insufficient actual microwave output power.

[0089] When the system and method are applied to the preparation of optical fiber preform core rods, the relative refractive index and core diameter test results of the obtained core rods can be found in Figure 5 and Image 6 Option 3. see Figure 5 , compared with the sc...

Embodiment 2

[0091] The PCVD deposition system and method provided in this embodiment are the same as Comparative Example 2, except that in step S4, the actual output power of the microwave generator 4 in the gas end area 20 is set to 6.0kw, and the pump end area 22 The actual output power of microwave generator 4 is set to 5.0kw. At the same time, the actual output power of the microwave generator 4 in the middle end area 21 is maintained at a preset output power of 7.0 kw.

[0092] During the raw material gas deposition process, normal deposition was observed on the inner surface of the gas end region 20 of the liner 2 in this embodiment.

[0093] When the system and method are applied to the preparation of optical fiber prefabricated core rods, the relative refractive index and core diameter test results of the obtained core rods can be found in Figure 5 and Image 6 Option 4. see Figure 5 , compared with scheme 1 of comparative example 1, in scheme 4 provided by the present embod...

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Abstract

The invention discloses a system, method and application for improving the deposition uniformity of PCVD raw material gas, and relates to the technical field of optical fiber prefabricated rod production. The system includes a liner, a microwave generator, and a holding furnace with a temperature measuring probe inside; the holding furnace is provided with gas end, middle end, and pump end areas in sequence along the axial direction of the liner; the microwave generator is installed in each area. The preset output power is the same; the system also includes a PLC control unit, which is configured to, according to the set temperature of the real-time position fed back by the temperature measuring probe, determine the end position of the gas end area or the start position of the middle end area, and the end position of the middle end area position or the initial position of the pump end area, and change the actual output power of the microwave generator at the initial position of the gas end area and the initial position of the pump end area, and maintain the changed actual output power constant in the gas end area and the pump end area. The invention has simple operation and high degree of automatic operation, realizes the uniformity of overall deposition in the liner deposition section, and effectively reduces the rod manufacturing cost.

Description

technical field [0001] The invention belongs to the technical field of optical fiber prefabricated rod production, and specifically relates to a system, method and application for improving the uniformity of PCVD raw material gas deposition, in particular to a system for improving the uniformity of PCVD raw material gas deposition, and a method for improving the uniformity of PCVD raw material gas deposition. A unique method and the application of the system or method in the preparation of optical fiber prefabricated core rods. Background technique [0002] PCVD (Plasma Chemical Vapor Deposition) is a plasma chemical vapor deposition method. The preparation of optical fiber preforms by PCVD technology uses microwaves as a heat source, and at the same time assists the use of a holding furnace to insulate the reaction liner and provide a constant temperature field. The reaction raw material is SiCl 4 , O 2 , while GeCl 4 and C 2 f 6 etc. as dopants to participate in the r...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C03B37/018
CPCC03B37/0183C03B2201/31
Inventor 岳静喻煌骆城彭楚宇蔡冰峰
Owner FENGHUO COMM SCI & TECH CO LTD
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