Micro dynamic pressure sensor detection system based on MEMS technology

Abstract

The invention relates to a micro dynamic pressure sensor detection system based on an MEMS technology. The micro dynamic pressure sensor detection system comprises a box body, air supply units, a fixing unit, a detection unit, a hinge, a box door, an observation window, a knob and a central control unit. The air supply units are arranged at the top of the box body; the air inlet ends of the air supply units are respectively connected with air storage tanks in which corresponding air is stored; when the parameters of the sensor to be detected are detected, corresponding types of gas can be selected according to actual conditions and introduced into the box body so as to simulate the actual working environment of the sensor; the deviation of different gas environments during detection can beeffectively avoided; and meanwhile, the system can select different detection standards according to the specific working environment of the sensor to be detected, i.e., different detection pressureranges are used for carrying out targeted detection on the sensor to be detected, so that the detection efficiency of the system is improved.

Description

technical field [0001] The invention relates to the technical field of sensor detection, in particular to a micro dynamic pressure sensor detection system based on MEMS technology. Background technique [0002] A pressure sensor is a device or device that can sense pressure signals and convert the pressure signals into usable output electrical signals according to certain rules. A pressure sensor is usually composed of a pressure sensitive element and a signal processing unit. According to different test pressure types, pressure sensors can be divided into gauge pressure sensors, differential pressure sensors and absolute pressure sensors. Pressure sensors are the most commonly used sensors in industrial practice. They are widely used in various industrial automatic control environments, involving water conservancy and hydropower , railway transportation, intelligent building, production automation, aerospace, military industry, petrochemical, oil well, electric power, shi...

AI Technical Summary

Problems solved by technology

[0005] For this reason, the present invention provides a micro dynamic pressure sensor detection system based on MEMS technology to overcome the problem in the prior art that the detection environment cannot be adjusted according to the environment in which the sensor is used, resulting in low detection accuracy of the sensor in the specified environment after detection.

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