Preparation method of large-size rotary ceramic target material

Abstract

The invention discloses a preparation method of a large-size rotary ceramic target material, and belongs to the technical field of target material preparation, and the method comprises the following steps: 1) manufacturing a target material blank, 2) forming a mold, 3) degreasing the target material blank, 4) pre-sintering the target material blank, and 5) sintering the target material. Accordingto the preparation method of the large-size rotary ceramic target material, the yield of the target material is improved, the rejection rate of raw materials is reduced, and the production cost is reduced.

Description

technical field [0001] The invention belongs to the technical field of target material preparation, and in particular relates to a method for preparing a large-size rotating ceramic target material. Background technique [0002] Magnetron sputtering of ITO conductive transparent film is an indispensable and important process in the field of flat panel displays. The 30-35% of the target is increased to 80%. Due to the limitations of the process and production conditions, it is impossible to prepare a super-long target that can be used directly in a single segment. Instead, it is assembled with multiple segments of 200-600 mm. It is generally believed in the industry that the gap between the segments of the rotating target The quality of the transparent conductive film has an important influence. In order to further improve the coating quality of the rotating target, it is required to reduce the number of joints, which requires increasing the length of a single target. The s...

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Problems solved by technology

The shorter rotating target is sintered with the axis perpendicular to the horizontal plane. After its length increases to a certain value, because its own weight is too large, it will appear that the upper, lower, and lower diameters shrink inconsistently due to the friction with the setter. The bell mouth phenomenon and the ellipse phenomenon appearing on the cross section. At the same time, the excessive temperature difference between the upper and lower sides of the furnace body will also cause the density deviation of the target to exceed the standard. In addition, the temperature and pressure resistance of the furnace bottom is caused by the density deviation. Different, so different degrees of deformation under high temperature and heavy pressure make the center of gravity of the target tilt, so that the straightness deviation of the target in the length direction is too large

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