Nonvolatile memory and forming method thereof
A non-volatile, memory technology used in the semiconductor field to solve problems such as low erasing efficiency
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[0086] The non-volatile memory and its forming method proposed by the present invention will be further described in detail below with reference to the drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description. It should be noted that all the drawings are in a very simplified form and use imprecise scales, and are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention.
[0087] Figure 2a The layout structure of the non-volatile memory in an embodiment of the present invention, Figure 2b for Figure 2a The shown non-volatile memory corresponds to the cross-sectional schematic diagram of the aa' direction, Figure 2c for Figure 2a The shown non-volatile memory corresponds to a schematic cross-sectional view in the direction of bb'. Such as Figure 2a ~ Figure 2c As shown, the non-volatile memory includes:
[0088] At least one subst...
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