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Object surface three-dimensional morphology feature measurement method, device and equipment and storage medium

A technology of three-dimensional shape and object surface, which is applied in the field of optical inspection, can solve the problems of low measurement accuracy, low measurement efficiency, and no consideration of filtering, etc., and achieve the effect of improving accuracy, improving efficiency, and correcting measurement errors

Active Publication Date: 2020-06-16
HUAQIAO UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in this paper, the filtering of the H value with a large error is not considered, and the centroid of the color image to be processed cannot be automatically extracted for calibration, the measurement accuracy is low, and the algorithm can only be applied to single-point color confocal measurement, not Applied to parallel color confocal measurement, low measurement efficiency

Method used

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  • Object surface three-dimensional morphology feature measurement method, device and equipment and storage medium
  • Object surface three-dimensional morphology feature measurement method, device and equipment and storage medium
  • Object surface three-dimensional morphology feature measurement method, device and equipment and storage medium

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Embodiment 1

[0062] See figure 1 with figure 2 The present invention provides a method for measuring three-dimensional topographic features of an object surface, which can be executed by a three-dimensional topographic feature measuring device (hereinafter referred to as "measurement device"), in particular, by one or more processes in the measuring device It mainly includes the calibration process and the measurement process. Among them, the calibration process sequentially calibrates the N fibers that make up the fiber bundle. The measurement process is to combine the calibration curve with the color of the object to be measured after the calibration of the N fibers is completed. The image is processed with data to obtain the three-dimensional topographical characteristics of the surface of the measured object.

[0063] Specifically, the calibration curve obtained in the calibration process of the present invention refers to the basic "H value-height" curve obtained by taking the object sur...

no. 2 example

[0082] See image 3 , The implementation of the present invention provides a device for measuring three-dimensional topography features of an object surface, including:

[0083] The color image acquisition unit 100 is configured to acquire M color images corresponding to M height points of the sample object;

[0084] The centroid extraction unit 200 is configured to extract the centroids of the N optical fiber spots of the color image at different positions based on the adaptive centroid extraction algorithm; wherein the optical fiber bundle measured in parallel is composed of N optical fibers;

[0085] The target image interception unit 300 is configured to intercept the target image corresponding to the position of the optical fiber light spot in the color image according to the centroid of the light spot;

[0086] The color space conversion unit 400 is configured to perform color space conversion on the target image to obtain the hue parameter H value related to the wavelength;

[0...

no. 3 example

[0102] The third embodiment of the present invention also provides a device for measuring three-dimensional topography features of an object surface, including a processor, a memory, and a computer program stored in the memory, and the computer program can be executed by the processor to achieve The method for measuring the three-dimensional topographic features of the object surface described in the above embodiment.

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Abstract

The invention discloses an object surface three-dimensional morphology feature measurement method, device and equipment and a storage medium. The method comprises the steps: M color images corresponding to M height points are acquired; centroids of N optical fiber light spots of the color image at different positions are extracted based on an adaptive centroid extraction algorithm, wherein the optical fiber bundle for parallel measurement is composed of N optical fibers; a target image corresponding to the optical fiber light spot position in the color image is intercepted according to the light spot centroid; color space conversion is conducted on the target image to obtain a hue parameter H value related to the wavelength; the hue parameter H value is screened and filtered to obtain a corresponding standard H value; an H value-height calibration curve of the optical fiber is obtained according to the standard H value and the height corresponding to the standard H value; and the to-be-measured target object is substituted into the calibration curve input, and the three-dimensional morphology feature of the object surface of the to-be-measured target is measured. Measurement errorscaused by transverse crosstalk between adjacent optical fibers can be corrected, and the three-dimensional morphology of the surface of an object can be measured.

Description

Technical field [0001] The invention relates to the field of optical detection, in particular to a method, device, equipment and storage medium for measuring three-dimensional topographic features of an object surface. Background technique [0002] With the advancement of science and technology and the development of productivity, there is a great demand for the measurement of the three-dimensional topography of the object surface in various fields, especially in the fields of intelligent manufacturing, aerospace, cultural relics protection, medical and health, distance education, etc. application. Nowadays, three-dimensional surface topography measurement of objects has become a hot spot for experts and scholars at home and abroad. More and more scientific research workers invest a lot of time and energy to study various surface three-dimensional topography measurement technologies to meet the requirements of measurement. demand. [0003] Defects of existing technology: [0004] ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/25G06T7/90
CPCG01B11/2509G06T2207/10012G06T2207/10024G06T7/90
Inventor 余卿张雅丽程方王寅张一尚文键邹景武周东方张昆
Owner HUAQIAO UNIVERSITY
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