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Temperature self-compensation in-plane biaxial acceleration sensor and temperature compensation method

A dual-axis acceleration and self-compensation technology, applied in speed/acceleration/shock measurement, measurement of acceleration, testing/calibration of speed/acceleration/shock measurement equipment, etc., can solve the problem of high power consumption, large system size, failure to consider Problems such as thermal expansion effect of silicon material, display drift, etc., achieve the effect of eliminating system error and dead zone

Active Publication Date: 2020-05-15
XI AN JIAOTONG UNIV
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Problems solved by technology

There are two mainstream temperature compensation schemes: one is active temperature compensation, which uses precision thermocouples and heaters to keep the temperature around the sensor constant, but its disadvantages are large system size and high power consumption, which are not suitable for small sensors; Passive temperature compensation, arrange a bridge or the same sensitive element next to the sensitive element, and use a differential method to eliminate the influence of the first-order temperature coefficient, but this method fails to consider the reading drift caused by the thermal expansion effect of the silicon material, and the effect is not ideal

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[0035] In describing the present invention, it should be understood that the terms "center", "longitudinal", "transverse", "upper", "lower", "front", "rear", "left", "right", " The orientation or positional relationship indicated by "vertical", "horizontal", "top", "bottom", "inner", "outer", "side", "end", "side" etc. is based on the Orientation or positional relationship is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as "first" and "second" may explicit...

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Abstract

The invention discloses a temperature self-compensation in-plane biaxial acceleration sensor and a temperature compensation method. The sensor comprises a mass block, a plurality of groups of resonance sensitive elements are uniformly arranged around the mass block in a central symmetry manner, when acceleration in any direction and any magnitude in a plane is applied to the device, the mass blockapplies stress to the plurality of groups of resonance sensitive elements at the same time, the intrinsic frequency of the resonance sensitive elements is changed, and the resonance frequency is readout by corresponding real-time frequency reading circuits respectively. Compared with a traditional differential single-axis acceleration sensor, the sensor has unique advantages in the aspects of measurement precision, sensitivity, measurement range and the like. According to the temperature compensation method provided by the invention, the system error caused by the temperature is eliminated,and the current temperature value information can be additionally provided.

Description

technical field [0001] The invention belongs to the technical field of acceleration detection, and in particular relates to a temperature self-compensating in-plane biaxial acceleration sensor and a temperature compensation method. Background technique [0002] In today's "Made in China 2025", the demand for ultra-high-precision accelerometers is increasing day by day. Since its birth, the silicon-based MEMS resonant accelerometer has been favored and valued by researchers from all over the world for its excellent sensitivity, stability, and high integration. [0003] With the expansion of the application field of acceleration sensors, the demand for simultaneous measurement of multi-axis acceleration has become increasingly prominent. Such as seismic wave detection, unmanned vehicles, unmanned aerial vehicles, etc., all need to measure the acceleration in at least two directions at the same time to ensure the stable operation of the system. At present, there are two mains...

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Application Information

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IPC IPC(8): G01P15/097G01P21/00
CPCG01P15/097G01P21/00
Inventor 韦学勇王曙东徐柳朱威龙蒋庄德
Owner XI AN JIAOTONG UNIV
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