Two-dimensional micro-displacement sensor based on four-quadrant grating and detector

A four-quadrant detector, two-dimensional micro-displacement technology, applied in instruments, measuring devices, optical devices, etc., can solve problems such as inability to improve accuracy, low reliability, and difficulty in installation, and achieve improved resolution and accuracy. Increase the range and eliminate the effect of low sensitivity

Active Publication Date: 2021-06-11
ZHONGBEI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Aiming at the technical problems of the above-mentioned traditional geometric moiré fringe technology, such as difficult installation, low reliability, and unimprovable precision, the present invention provides a high-sensitivity, high-linearity, and strong anti-electromagnetic interference capability based on four-quadrant gratings and detectors. Two-dimensional micro-displacement sensor

Method used

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  • Two-dimensional micro-displacement sensor based on four-quadrant grating and detector
  • Two-dimensional micro-displacement sensor based on four-quadrant grating and detector
  • Two-dimensional micro-displacement sensor based on four-quadrant grating and detector

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Embodiment

[0033] The embodiment parameters of the two-dimensional micro-displacement sensor based on four-quadrant grating and detector are as follows:

[0034] Laser wavelength: λ=635nm;

[0035] Movable grating period: d=800nm;

[0036] Four-quadrant grating period: d=800nm.

[0037] The specific analysis is as follows:

[0038] The intensity of light passing through the first quadrant is:

[0039]

[0040] The intensity of light passing through the second quadrant is:

[0041]

[0042] The intensity of light passing through the third quadrant is:

[0043]

[0044] The intensity of light passing through the fourth quadrant is:

[0045]

[0046] The light intensity difference through the first quadrant grating and the third quadrant grating is:

[0047]

[0048] The light intensity difference passing through the second quadrant grating and the fourth quadrant grating is:

[0049]

[0050] From the above derivation, it can be seen that the DC offset of the light...

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Abstract

The invention belongs to the technical field of micro-displacement sensors, and specifically relates to a two-dimensional micro-displacement sensor based on a four-quadrant grating and a detector, including a first laser, a second laser, a first collimator lens, a second collimator lens, a movable grating, four-quadrant grating, and four-quadrant detector, the first laser and the second laser are respectively arranged directly above the first collimating lens and the second collimating lens, and the first collimating lens and the second collimating lens A movable grating is arranged under the lens, and an X-axis four-quadrant grating and a Y-axis four-quadrant grating are arranged under the movable grating, and a first Four-quadrant detector, the second four-quadrant detector. The present invention generates four-channel signals through a four-quadrant grating and a detector for differential, which is beneficial to subsequent high-magnification subdivision, can eliminate background noise and DC components, and improve the resolution and precision of micro-displacement detection. The invention is used for the measurement of micro-displacement.

Description

technical field [0001] The invention belongs to the technical field of micro-displacement sensors, in particular to a two-dimensional micro-displacement sensor based on a four-quadrant grating and a detector. Background technique [0002] Displacement is the most basic physical quantity. Among them, high-precision displacement measurement technology is the basis of precision machining and has a wide range of applications. The measurement accuracy of the displacement measurement sensor determines the manufacturing accuracy of the entire manufacturing industry, and the manufacturing industry is the foundation of the entire industry, which restricts the development of various fields. With the continuous development of precision manufacturing technology, the improvement of the precision of processed objects requires displacement measuring instruments to have the characteristics of high precision, high resolution, high reliability, large range, small volume and low cost. [0003...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 张瑞李孟委靳黎明金丽
Owner ZHONGBEI UNIV
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