Compact rigid-flexible coupling platform connecting structure and multi-axis motion platform formed by same

Abstract

The invention discloses a compact rigid-flexible coupling platform connecting structure and a multi-axis motion platform formed by same. The compact rigid-flexible coupling platform connecting structure comprises an upper platform, a lower platform, a motion detection element and a driving device, wherein an upper platform base is designed into a rigid-flexible coupling structure and is mounted ona lower platform guide rail; the driving device is mounted on the lower platform and drives the upper platform to move along the guide rail direction; the motion detection element detects the displacement or speed of an upper platform frame; and a second detection element can be selected to detect the deformation amount or deformation speed of a flexible hinge. According to the compact rigid-flexible coupling platform connecting structure, the bottom of the upper platform and the lower platform are integrated, and a middle connecting plate is omitted, so that the overall gravity center of theplatform is reduced, the structure is compact, and the Z direction is flattened; and moreover, multiple layers of platforms can be superposed, multi-degree-of-freedom motion is realized, and the required multi-degree-of-freedom high-precision motion platform is flexibly constructed. In addition, the rigid-flexible coupling connecting structure adopts the sandwich type flexible hinge, and meanwhile, no assembly error and fatigue life are guaranteed.

Description

technical field [0001] The invention relates to a rigid-flexible coupling platform, in particular to a compact rigid-flexible coupling platform connection structure and a multi-axis motion platform formed thereof. Background technique [0002] Large-stroke high-precision motion platforms are widely used in semiconductor packaging and other fields. In order to comprehensively take into account the requirements of both large stroke and high precision, the macro-micro composite motion platform is widely used in the design of the above-mentioned large stroke high-precision motion platform. In a typical macro-micro compound motion platform, the problem of friction dead zone can be effectively solved based on the flexible hinge, and it has the advantage of greatly improving the positioning accuracy without increasing the cost. Therefore, the micro-motion platform often adopts the flexible hinge-based Design. For example, Patent No. CN201310065603.5 discloses a coaxial macro-micr...

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Problems solved by technology

However, the two-dimensional micro-motion mechanism based on the flexible hinge of the above two patents also has a weak carrying capacity, and it is difficult to continue to be used in the construction of a large-stroke high-precision motion platform with a higher degree of freedom

Therefore, the patent No. CN201710883865.0 discloses a large load-bearing flexible hinge and a multi-degree-of-freedom combination method. This patent uses a large-load-bearing space flexible mechanism to realize the multi-degree-of-freedom mechanism combined by rigid-flexible coupling platforms. However, the upper layer The entire base of the platform is installed on a flexible platform, with a high center of gravity, large overturning moment, and easy deformation

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