A variable load ultra-low frequency vibration isolator and its design method

Abstract

The invention discloses a variable load ultra-low frequency vibration isolator, which comprises a rectangular shell, a vibration isolation bearing platform, a bearing rod, a first connecting rod, a second connecting rod, a first negative stiffness element, and a second negative stiffness element , a fixed plate and a linear elastic element, the first stiffness element and the second stiffness element match each other to form a double negative rigidity, and form a positive and negative stiffness parallel connection with the linear elastic element. The invention can realize the ultra-low natural frequency of the vibration isolation system, and can adapt to the change of the load within a certain range without adjusting the working point of the vibration isolator, so as to maintain the performance of the vibration isolator under different vibration isolation loads stability, and eliminate the effect of vibration amplitude on the performance of the vibration isolation system. In addition, the invention also provides a design method of an ultra-low frequency vibration isolator with variable load.

Description

technical field [0001] The invention relates to the field of ultra-low frequency vibration reduction and isolation, and specifically discloses an ultra-low frequency vibration isolator with variable load and a related method. [0002] technical background [0003] With the continuous development of a series of ultra-precision machining and measurement technologies represented by ultra-precision machining, semiconductor processing, and micro-nano manufacturing, the machining and measurement accuracy is getting closer and closer to the physical limit, so small environmental vibrations may cause Its processing or detection failure. In order to ensure the accuracy of processing and measurement, this type of processing and measuring equipment puts forward extremely high requirements on environmental vibration. Generally speaking, environmental vibration is generally distributed in the low-frequency ultra-low frequency range, and is distributed in a certain frequency band range. ...

AI Technical Summary

Problems solved by technology

At the same time, the vibration isolator provided by the invention can effectively overcome the disadvantages of poor adaptability to vibration isolation loads of the existing vibration isolation system, has no strict requirements on the working point, and has the advantages of very simple structure and low cost

Images