A kind of ultra-low frequency vibration isolator and its design method

Abstract

The invention discloses an ultra-low frequency vibration isolator, which comprises a vibration isolation bearing plate, a rectangular shell, an upper rigid rod, a lower rigid rod, an upper adjustment mechanism, a lower adjustment mechanism, a negative stiffness element with negative stiffness characteristics, and a positive A linear elastic element with stiffness characteristics; a design method for an ultra-low frequency vibration isolator is also published. The invention has a simple assembly structure and avoids the high-precision requirements of concentric installation, and the invention can make the vibration isolator maintain a linear low stiffness characteristic near the working point, thereby eliminating the restriction of the vibration amplitude on the performance of the vibration isolator, thereby achieving excellent performance. Low frequency vibration isolation performance.

Description

technical field [0001] The present invention relates to the field of ultra-low frequency vibration reduction and isolation, in particular to an ultra-low frequency vibration isolator and its design method [0002] technical background [0003] With the continuous development of a series of ultra-precision processing and measurement technologies represented by ultra-precision grinding, semiconductor processing, micro-nano manufacturing, and surface topography measurement, the processing and measurement accuracy is getting closer and closer to the physical limit. Therefore, the tiny environment Vibration may cause its processing or detection failure. In order to ensure the accuracy of processing and measurement, this type of processing and measuring equipment puts forward extremely high requirements on environmental vibration. Generally speaking, environmental vibration is generally distributed in the low-frequency ultra-low frequency range, and is distributed in a certain fre...

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Problems solved by technology

An invention patent titled "A Parallel Shock Absorber with Positive and Negative Stiffness" (application number CN201310142491.9) proposes a shock absorber based on a parallel connection of a positive stiffness air spring and a negative stiffness magnetic spring. The positive stiffness air spring Arranged in parallel with the negative stiffness magnetic spring, the negative stiffness magnetic spring is installed in the air spring chamber, the problem is that the negative stiffness mechanism is composed of multiple radially magnetized tile-shaped permanent magnets, and the process cost of radially magnetized permanent magnets is high and difficult Large, while the negative stiffness magnetic spring is composed of a large number of permanent magnets, so the processing is complicated and the assembly cost is extremely high

[0006] An invention patent named an ultra-low frequency vibration isolator and its design method (application number: 2019105719451), using an axially magnetized annular permanent magnet as a negative stiffness element, and considering the impact of the vibration source amplitude on the performance of the vibration isolation system during the design process However, the processing cost of the axially magnetized annular permanent magnet is high, and at the same time, it can require two permanent magnets to be concentric and require high precision during assembly, which has the disadvantages of high assembly cost and difficulty

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