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A metal point source for evaporation equipment and its application

A metal point and metal technology, applied in the field of metal point sources, can solve the problems of inability to guarantee the uniformity of heating and the inability to meet the requirements of fine control of evaporation, and achieve the effects of stable heat conduction and dissipation, reducing heat dissipation and heating uniformity.

Active Publication Date: 2020-12-01
山东国晶新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The traditional heating method cannot guarantee the uniformity of heating, nor can it meet the fine control requirements of evaporation, so it is urgent to find other metal point sources to accurately control the temperature uniformity of the evaporation material, and then more finely control the evaporation rate of the evaporation material , so as to obtain high-quality films

Method used

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  • A metal point source for evaporation equipment and its application
  • A metal point source for evaporation equipment and its application
  • A metal point source for evaporation equipment and its application

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0057] This embodiment provides a metal point source for evaporation equipment, including a connection base 2, a connection flange 3, an external electrode 1, a thermocouple 5, a cooling water pipe 4, a metal heater, a heat preservation plate 11 and a cooling water jacket 12;

[0058] The metal heater is connected to the inner wall of the insulation board 11, and the insulation board 11 is provided with a cooling water jacket 12, and the bottom of the cooling water jacket 12 is connected with a bottom ring 9, and the large support plate 8 is located in the bottom ring 9 and passes through the small support at the bottom of the bottom ring 9 The board 7 is supported and connected, and a base plate 10 is arranged above the large supporting plate 8, and the base plate 10 is supported and connected to the heat preservation board 11;

[0059] The external electrode 1 and the thermocouple 5 run through the connection base 2 respectively, and the connection base 2 is installed on the...

Embodiment 2

[0074] A kind of metal point source that is used on the vapor deposition equipment, the structure is as described in embodiment 1, and its difference is: be provided with 3 groups of thermocouple joints 15 on the connection base 2, as Figure 13 shown. Set up 2 more thermocouple connectors for backup to avoid failure and failure to work normally.

Embodiment 3

[0076] A metal point source used on evaporation equipment, the structure is as described in Embodiment 1, the difference is that: the bottom of the bottom ring 9 is connected with a shield 6, and the shield 6 is connected with the bottom ring 9 by screws. Such as figure 1 As shown, the shield plays the role of isolation protection.

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Abstract

The invention relates to a metal point source for evaporation equipment and application of the metal point source. A metal heater is connected to the inner wall of a heat preservation plate, a coolingwater jacket is arranged outside the heat preservation plate, the bottom of the cooling water jacket is connected with a bottom ring, a large supporting plate is located in the bottom ring and is supported and connected through a small supporting plate at the bottom of the bottom ring, and a bottom plate is arranged over the large supporting plate and is supported and connected with the heat preservation plate; and an external electrode and a thermocouple penetrate through a connecting flange, the top end of the external electrode is electrically connected with the bottom end of the metal heater and located in the heat preservation plate, and the upper end and the lower end of a cooling water pipe are connected with the cooling water jacket and the connecting flange respectively. Electricheating wires are only arranged on the side face, a partition heating mode is adopted, heat of a heating area can be accurately controlled, and heating is more uniform. A crucible is only supported at an upper opening of the point source, and other parts of the crucible are prevented from conducting heat through a insulating strip and the supporting frame, so that temperature control is more accurate and uniform.

Description

technical field [0001] The invention relates to a metal point source used on evaporation equipment and its application, belonging to the technical field of material thermal evaporation. Background technique [0002] The point source used in the field of evaporation is used to heat the crucible, which is filled with evaporation materials. At present, the point source used in the field of evaporation is mostly supported and heated at the bottom of the crucible, so that the position near the bottom of the crucible The temperature of the evaporating material will be high, and the temperature of the evaporating material near the upper end will be low, so the heating method cannot guarantee the uniformity of heating. Different crucibles contain different evaporating materials, and different evaporating materials have different evaporation temperatures. The temperature is too high and too low will cause major problems in the evaporation process, which cannot meet the fine control r...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/24C23C14/54
CPCC23C14/24C23C14/54
Inventor 刘汝强王殿春王之腾刘庆毅孙蕾
Owner 山东国晶新材料有限公司
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