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Six-degree-of-freedom magnetic suspension rotary table and control system and method

A technology of magnetic levitation and degrees of freedom, applied in the field of magnetic levitation, can solve the problems of complex structure of the rotary table, less freedom of movement, and low rigidity of the platform, and achieve the effects of high power density, easy manufacture and strong bearing capacity.

Active Publication Date: 2020-03-27
WUHAN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In order to solve the shortcomings of the existing rotary table, such as complex structure, less freedom of movement, high friction, low platform rigidity and low thrust density, the present invention proposes a neutron-symmetrical magnetic levitation turntable, which is easy to manufacture and assemble, and has a dense coil array The arrangement increases the thrust density and platform rigidity, and the turntable has the ability of multi-degree-of-freedom movement, which can be widely used in various fields such as micro-milling and optical antenna tracking system

Method used

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  • Six-degree-of-freedom magnetic suspension rotary table and control system and method

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Embodiment

[0032] Such as figure 1 with figure 2 As shown, the six-degree-of-freedom magnetic levitation turntable of the present invention is mainly composed of an elliptical target 11, a circular stage 10, a permanent magnet array 9, a coil support 7, a coil array 8, a square base 4, an upper surface sensor support 5 and an upper The end surface photoelectric sensor 6, the lower end surface sensor bracket 12 and the lower end surface photoelectric sensor 13, the vertical support frame 3, the horizontal support frame 2, and the optical vibration isolation platform 1 are composed. Among them, the elliptical target 11, the circular stage 10, and the permanent magnet array 9 arranged in a circular shape are the mover part of the system, and the coil support 7, the coil array 8, the square base 4, the vertical support frame 3, The horizontal support frame 2 and the optical vibration isolation platform 1 constitute the stator part of the system. The system maintains a stable non-mechanica...

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Abstract

The invention discloses a six-degree-of-freedom magnetic suspension rotary table and a control system and method. The six-degree-of-freedom magnetic suspension rotary table comprises an optical vibration isolation platform, a horizontal supporting frame, a vertical supporting frame, a platform base, a coil support, a coil array, a magnet array, a circular objective table, an elliptical target object, photoelectric sensors around a coil, supports of the photoelectric sensors, photoelectric sensors below the coil and supports of the photoelectric sensors. The invention has the characteristics ofsimple structure, multiple degrees of freedom of motion, high bearing rigidity, high thrust density, high rotation precision and vacuum compatibility, and can be widely applied to the fields of micromachining, radars, optical antenna tracking systems and the like.

Description

technical field [0001] The invention belongs to the technical field of magnetic levitation, and in particular relates to a high-precision six-degree-of-freedom magnetic levitation turntable, which can be used for micromachining, aerospace vehicle simulation turntable and the like. Background technique [0002] Precision turntables have important application value in modern science and production, such as micromachining, spacecraft simulation test platform, laser communication optical antenna tracking system, etc. This rotary table is a high-precision equipment that requires low friction, high positioning accuracy, fast response, and high structural rigidity. Almost all existing precision turntables can only achieve single-degree-of-freedom rotary motion, which limits the application range of precision turntables. Especially in the fields of semiconductor processing and tactile feedback systems, the positioning platform not only needs a wide range of angular rotation, but al...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N15/00
CPCH02N15/00
Inventor 许贤泽鲁兴徐逢秋
Owner WUHAN UNIV
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