Plate type valveless piezoelectric pump and working method thereof

Abstract

The invention discloses a plate type valveless piezoelectric pump and a working method thereof. The plate type valveless piezoelectric pump comprises a plate type piezoelectric base body, a flexible rectangular strip, a pre-pressure frame and piezoelectric ceramic sheets; the piezoelectric base body is of a rectangular plate structure, the upper end face is provided with a rectangular groove, andthe lower end face is provided with a flow inlet hole and a flow outlet hole; the pre-pressure frame is of a frame structure with an opening, and the upper inner wall is provided with a convex rectangular structure which is used for pressing the flexible rectangular strip; the four rectangular piezoelectric ceramic sheets are symmetrically arranged on the two sides of the piezoelectric base body;and during working, the flow inlet hole is filled with liquid, same-frequency equal-amplitude electric signals with the phase difference of pi / 2 are adopted to excite the four piezoelectric ceramic sheets correspondingly, the piezoelectric base body generates second-order bending vibration and first-order longitudinal vibration, the second-order bending vibration and the first-order longitudinal vibration are coupled to form standing wave motion, a movable cavity is formed at the interface matched with the flexible rectangular strip, and the liquid is transported from the flow inlet hole to the flow outlet hole. The pump has the advantages that the structure is simple, the output flow is high, the backflow can be effectively reduced, and miniaturization can be realized.

Description

technical field [0001] The invention relates to the technical field of fluid machinery, in particular to a plate-type valveless piezoelectric pump and a working method thereof. Background technique [0002] Compared with traditional pumps, piezoelectric pumps have been widely used in biomedical, aerospace, microelectronics cooling and other fields due to their advantages of precise control of micro flow, simple structure, no noise, low power, no electromagnetic interference and no electromagnetic interference. widely used. [0003] The power of the piezoelectric pump to transport liquid comes from the deformation caused by the inverse piezoelectric effect of the piezoelectric substrate; from the perspective of whether there is a valve, the piezoelectric pump can be divided into a valve piezoelectric pump and a valveless piezoelectric pump. Valved piezoelectric pumps have the problem of complex structure and difficult miniaturization, and under high-frequency conditions, the...

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Problems solved by technology

[0003] The power of the piezoelectric pump to transport liquid comes from the deformation caused by the inverse piezoelectric effect of the piezoelectric substrate; from the perspective of whether there is a valve, the piezoelectric pump can be divided into a valve piezoelectric pump and a valveless piezoelectric pump. Valved piezoelectric pumps have the problem of complex structure and difficult miniaturization, and under high-frequency conditions, the one-way valve cannot track the action and cannot transport liquid; valveless piezoelectric pumps are easy to miniaturize, and there is no High-frequency working conditions cannot track the action; however, valveless piezoelectric pumps generally have the problems of small output flow, low output pressure, and serious backflow

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