Efficient mounting and clamping method for single crystal silicon thermal field crucible

Abstract

The invention discloses a single crystal silicon thermal field crucible efficient mounting and clamping method, which comprises the following steps that S1, a fixed tray is arranged in a dry boiler outer shell, three groups of graphite crucible trays are fixed to the fixed tray, and a graphite crucible is formed; S2, the quartz crucible is placed on a graphite crucible, and the quartz crucible isclamped through three groups of graphite crucible trays; S3, the dry boiler top base and the dry boiler outer shell are fixed in a screw joint mode through an annular fixing bolt and an annular bolt groove; S4, production of the single silicon product is carried out; according to the mounting and clamping method of the thermal field crucible, the problems that an original crucible is troublesome to install and adjust and low in speed are solved, meanwhile, a new clamping mode is adopted, the crucible is more convenient to install and more convenient to overhaul and replace when a fault occurs,and therefore the purposes of improving production efficiency, reducing maintenance difficulty and saving time are achieved.

Description

technical field [0001] The invention belongs to the technical field of installation and clamping of a single-product silicon thermal field crucible, and in particular relates to an efficient installation and clamping method of a single-product silicon thermal field crucible. Background technique [0002] Single crystal silicon has a crystal with a basically complete lattice structure. Different directions have different properties. It is a good semiconductor material with a purity requirement of 99.9999%, or even more than 99.9999999%. It is used in the manufacture of semiconductor devices and solar cells. etc., drawn from high-purity polysilicon in a single crystal furnace. Single crystal silicon has a diamond lattice, the crystal is hard and brittle, has a metallic luster, and can conduct electricity, but its conductivity is lower than that of metals, and it increases with temperature. It has semiconductor properties and is the raw material for manufacturing semiconductor ...

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Problems solved by technology

[0004] The purpose of the present invention is to provide a method for efficiently installing and clamping a single-product silicon hot field crucible to solve the problem that a long preparation time is required before the preparation of a single-product silicon in the above-mentioned background technology, and the boiler is basically welded and fixed, which cannot be effectively carried out. Adjustment, when a fault occurs, it becomes very difficult to repair and replace. It not only wastes a lot of time, but also is not easy to disassemble, which affects the efficiency of production and processing and brings inconvenience to the process.

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