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Micro-nano probe automatic molding device with real-time adjustable force, and control method

An automatic forming and probe technology, applied in the micro-nano field, can solve the problems of poor forming effect, single forming structure, low precision, etc., and achieve the effect of real-time and effective control of stiffness

Active Publication Date: 2019-11-12
SHANGHAI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] In order to solve the deficiencies of the prior art, the present invention proposes a real-time adjustable micro-nano probe automatic forming device and control method, which solves the problems of single forming structure, low efficiency and poor forming effect of the existing hand-made micro-nano probes. Poor and low precision problems, and can realize real-time adjustable active force, force dynamic calculation, multi-mode servo feedback and other functions. It has the characteristics of automatic forming, real-time adjustable force, simple structure and easy realization.

Method used

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Embodiment Construction

[0029] The present invention will be further described below in conjunction with the accompanying drawings and specific preferred embodiments, but the protection scope of the present invention is not limited thereby.

[0030] see figure 2 and 3 The micro-nano probe automatic molding device with real-time adjustable force includes a base plate 21, which is fixed on the base platform 1 parallel to the base plate 21 through a first support rod 22, and the base plate 21 is fixed with an actuator and a movable probe support mechanism.

[0031] The probe support mechanism includes a fixed guide rail 20 fixed on the base plate 21 and two movable slide rail parts 18 sliding on the fixed guide rail 20. The movable slide rail parts 18 are supported by the second support bar 16 to replace The probe support base 15 and the replaceable probe support base 15 provided on the two movable slide rails 18 jointly support a probe, and the replaceable probe support base 15 is hinged with a repl...

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Abstract

The invention relates to the micro-electro mechanical system (MEMS), specifically a micro-nano probe automatic molding device with real-time adjustable force, and a control method. The automatic molding manufacturing of the micro-nano probe is realized through the real-time adjusting on the active force applied in the probe processing and the multi-mode servo feedback formed by combining the real-time imaging on the probe by a vision detection module and the touch information sensing by coupling a force detection module. The device has the advantages of being automatic in molding, real-time adjustable in force, simple in structure and easy to realize.

Description

technical field [0001] The invention relates to the field of micro-nano technology, in particular to micro-electromechanical integration, in particular to an automatic micro-nano probe forming device and control method with real-time adjustable force. Background technique [0002] As scientific research gradually enters the microscopic, the world of micro-nano scale has gradually unfolded in the eyes of researchers. At present, micro-nano probes are a common tool in the field of micro-nano scale research. They have a single structure, relatively simple preparation methods, It has advantages such as low cost, and has obvious economic and practical benefits in micro-nano operation and measurement. Under normal circumstances, according to the needs of scientific research tasks, micro-nano probes are made into various shapes that meet the requirements, so as to facilitate the smooth progress of the task, and in order to easily obtain simple probe shape structures, traditional ma...

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Application Information

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IPC IPC(8): G01R1/067
CPCG01R1/067
Inventor 沈斐玲曹宁李恒宇岳涛谢少荣罗均
Owner SHANGHAI UNIV
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