Device for measuring optical free-form surface

Abstract

The invention relates to a device for measuring an optical free-form surface, which is used for measuring a three-dimensional shape of a workpiece. The device comprises a focused type laser displacement sensor, a reflector, a gas floating measuring head, a nano two-dimensional displacement mechanism, a signal acquisition circuit of a focused type laser displacement sensor, an industrial control computer and a nano two-dimensional displacement mechanism controller, wherein the gas floating measuring head comprises a probe and a probe shaft; the reflector is arranged at the tail of the probe shaft; the probe shaft is arranged on a gas floating guide rail; the industrial control computer controls the nano two-dimensional displacement mechanism through the nano two-dimensional displacement mechanism controller to move according to a designed path; the probe of the gas floating measuring head slides on the surface of a test workpiece to enable the reflector to generate continuous axial movement; the focused type laser displacement sensor generates a focus error signal; and the focus error signal is input into the industrial control computer through the signal acquisition circuit.

Description

Technical field [0001] The invention belongs to the technical field of surface topography quality detection devices, and relates to a device for measuring optical free-form surfaces. Background technique [0002] Nowadays, optical systems are gradually developing towards smaller models. Optical free-form surfaces are the core key of optical systems. Optical free-form surfaces have always been a difficult problem for ultra-precision measurement due to their complex surface shape and large curvature characteristics. For the measurement of optical free-form surfaces, currently the UA3P of Japan's Panasonic Corporation and the British Taylor Hobson profiler are generally used. They are standards in academia and industry, but they all have the disadvantage of expensive equipment. Because it is difficult to measure optical free-form surfaces, it greatly limits the application of optical free-form surfaces. For the measurement of optical free-form surfaces, there are many methods such ...

AI Technical Summary

Problems solved by technology

For the measurement of the shape of optical free-form surfaces, the UA3P of Panasonic Corporation of Japan and the Taylor Hobson profiler of the United Kingdom are generally used at present. They are the standards in academia and industry, but they all have the disadvantage of expensive equipment.

Because it is difficult to measure optical free-form surfaces, it greatly limits the application of optical free-form surfaces

For the measurement of optical free-form surfaces, there are many methods such as optical microscopic measurement, optical interferometry, fringe projection, etc., but for optical free-form surfaces with large slopes, they cannot achieve ideal results.

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