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Non-spherical surface-shaped swing arm type detection device and method for achieving measuring head pose self-adjustment

A detection device and aspheric surface technology, which is applied in the direction of measuring devices, electromagnetic measuring devices, and electrical devices, etc., can solve the problems of high proficiency requirements for technicians and difficulties in multi-degree-of-freedom adjustment operations

Pending Publication Date: 2019-10-18
HANGZHOU DIANZI UNIV +1
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Problems solved by technology

[0004] The purpose of the present invention is to propose an aspheric surface swing arm detection device and method

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  • Non-spherical surface-shaped swing arm type detection device and method for achieving measuring head pose self-adjustment
  • Non-spherical surface-shaped swing arm type detection device and method for achieving measuring head pose self-adjustment
  • Non-spherical surface-shaped swing arm type detection device and method for achieving measuring head pose self-adjustment

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Embodiment Construction

[0033] In order to explain in detail the technical content, structural features, achieved goals and effects of the technical solution, the following describes the detailed description in combination with specific implementation methods and accompanying drawings.

[0034] Such as figure 1 As shown in the figure, the aspheric surface swing arm type detection device that realizes the self-adjustment of the probe position and posture includes a measuring device and a dual capacitive sensor probe 10 that detects the position of the aspheric detection probe 9 . The dual-capacitance sensor probe 10 adopts the capacimetric displacement sensor of Miiridium (Beijing) Testing Technology Co., Ltd. model capaNCDT6530; the dual-capacitance sensor probe 10 is fixed on the rotating table of the processing platform 12 .

[0035] The measuring device includes a horizontal drive mechanism 1 , a swing arm rotating platform 2 , a measuring arm, a measuring head vertical adjustment device and a mea...

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Abstract

The invention discloses a non-spherical surface-shaped swing arm type detection device and method for achieving measuring head pose self-adjustment. The existing swing arm type contourgraph is difficult to operate due to multiple degrees of freedom. A double-capacitor sensor measuring head is fixed on a rotating table surface of a machining platform; a measuring device comprises a horizontal driving mechanism, a swing arm rotating platform, a measuring arm, a measuring head vertical adjusting device and a measuring head module; the measuring arm consists of a rotating swing arm and a movable swing arm; and the measuring head vertical adjusting device comprises an X-axis adjusting device and a Y-axis adjusting device. The non-spherical contact type measuring head vertical state fine adjusting and aspheric contact type measuring head and the rotating table face of the machining platform can be automatically finished, the operation technology difficulty is reduced while the detection precision is ensured, the efficiency of the aspheric contact type measuring head adjusting process is improved, and the cost of the aspheric surface manufacturing process is lowered.

Description

technical field [0001] The invention relates to the technical field of surface shape detection of optical elements, in particular to an aspheric surface shape detection device and method for realizing self-adjustment of the position and posture of a measuring head. Background technique [0002] In recent years, due to its excellent optical performance, optical aspheric parts have played an increasingly important role in both military and civilian applications, and the demand for high-precision aspheric detection technology is also increasing. [0003] The swing arm profiler is an effective in-situ detection instrument for the optical mirror processing process. Its biggest feature is that it is directly installed next to the optical mirror to be tested, and the turntable of the optical mirror processing machine tool to be tested is used as the swing arm profiler. The turntable is used for in-situ measurement of the mirror surface to be tested. When using a swing-arm profiler...

Claims

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Application Information

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IPC IPC(8): G01B7/28G01B7/293
CPCG01B7/28G01B7/293
Inventor 胡违军王文卢科青时光郭宗福陈占锋居冰峰
Owner HANGZHOU DIANZI UNIV
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