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Superconducting magnet and magnetically-controlled Czochralski single crystal equipment

A superconducting magnet, Czochralski single crystal technology, applied in superconducting magnets/coils, single crystal growth, single crystal growth and other directions, can solve the problems of affecting the quality of single crystals, the magnetic field is not stable enough, and the space occupied by the power supply. Conducive to space layout and operation safety, saving power cost and usage cost, and preventing ripple effect

Pending Publication Date: 2019-08-16
杭州慧翔电液技术开发有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] In view of this, the embodiment of the present invention provides a superconducting magnet and magnetron Czochralski single crystal equipment to solve the problem of high electricity and use costs of conventional magnetron Czochralski single crystal superconducting magnets, and insufficient stability of the magnetic field, which affects the quality of the single crystal. , power supply space and other issues

Method used

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  • Superconducting magnet and magnetically-controlled Czochralski single crystal equipment
  • Superconducting magnet and magnetically-controlled Czochralski single crystal equipment
  • Superconducting magnet and magnetically-controlled Czochralski single crystal equipment

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Embodiment 1

[0028] figure 1 It is a schematic structural diagram of a superconducting magnet provided in Embodiment 1 of the present invention. Such as figure 1 As shown, the superconducting magnet is used in the preparation process of magnetron Czochralski single crystal, and specifically includes a superconducting switch 3, a superconducting coil 1, a coil frame 2 and a cryostat 5, wherein: the number of superconducting coils 1 is one set One or more groups are fixed on the coil frame 2, and a plurality of superconducting coils 1 are connected in series. There is at least one superconducting switch 3, which is connected in parallel with the superconducting coil 1, and is used to close when the superconducting coil 1 is excited to a set magnetic field by an excitation power supply, so as to connect each superconducting coil 1 to form a closed loop. The superconducting switch 3 is fixed on the set low magnetic field area of ​​the bobbin 1 . The coil bobbin 2 is placed in the cryostat 5...

Embodiment 2

[0040] figure 2 It is a schematic plan view of the structure of the superconducting switch in Embodiment 2 of the present invention. On the basis of Embodiment 1, preferably, the structure of the cryostat 5 is a structure soaked in liquid helium, and the superconducting switch 3 can be selected as a heating type superconducting switch. .

[0041] then as figure 2 As shown, the heated superconducting switch specifically includes: a non-inductive coil 7 , a heater 9 , a switch frame 8 and a terminal 10 .

[0042] The non-inductive coil 7 is wound on the switch skeleton 8 in a non-inductive winding manner, the incoming and outgoing lines of the non-inductive coil 7 are connected to the terminal 10, the superconducting coil 1 is connected to the terminal 10, and the heater 9 is connected to the terminal 10. The non-inductive coil 7 is placed close to it, and is wound and fixed with glass silk cloth. The incoming and outgoing wires of the heater 9 are drawn from the superconducti...

Embodiment 3

[0051] image 3 It is a schematic axial side view of the magnetron Czochralski single crystal device in Embodiment 3 of the present invention. Such as image 3 As shown, Embodiment 3 of the present invention provides a magnetron Czochralski single crystal device, including a single crystal furnace 11 and a superconducting magnet provided by any embodiment of the present invention. The superconducting magnet is arranged on the outside of the single crystal furnace 11, and is used to close the superconducting switch 3 when the excitation power source is excited to the set magnetic field, so that the superconducting coil 1 forms the magnetic field required for the magnetically controlled Czochralski single crystal, so as to remove Excitation power supply.

[0052] The magnetron Czochralski single crystal equipment provided in this embodiment, when preparing a single crystal, turn on the refrigerator 6 switch after the magnet is evacuated, so that the superconducting magnet is c...

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Abstract

An embodiment of the invention provides a superconducting magnet and magnetically-controlled Czochralski single crystal equipment. The superconducting magnet comprises a superconducting switch, superconducting coils, a coil framework and a cryostat. The superconducting coil is fixedly arranged on the coil framework; and the plurality of superconducting coils are connected in series. The superconducting switch is connected in parallel with the superconducting coils, and is fixedly arranged on the coil framework. The coil framework is arranged in the cryostat; and the cryostat is provided with arefrigerating machine. By setting the superconducting switch to be on and off, close conduction of current between the superconducting coils and the superconducting switch is realized so as to withdraw an excitation power source. The superconducting magnet and the magnetically-controlled Czochralski single crystal equipment solve the problems that the superconducting magnet in the existing magnetically-controlled Czochralski single crystal equipment is large in electric power cost and use cost, poor in quality of the produced single crystal and low in operation safety.

Description

technical field [0001] Embodiments of the present invention relate to the technical field of semiconductor manufacturing, and in particular to a superconducting magnet and a magnetron Czochralski single crystal device. Background technique [0002] Monocrystalline silicon is an important part of crystalline materials and is widely used in semiconductor manufacturing fields such as large-scale integrated circuits, rectifiers, high-power transistors, diodes, and solar panels. The production method of monocrystalline silicon is generally the Czochralski method, and the process steps of Czochralski single crystal are seeding, necking, shouldering, equal-diameter growth, finishing, and furnace release. With the rapid development of semiconductor microelectronic devices and large-scale integrated circuits and other device manufacturing technologies, the requirements for the quality and size of single crystal silicon are getting higher and higher, and the requirements for the prepa...

Claims

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Application Information

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IPC IPC(8): H01F6/06H01F6/04C30B15/00C30B33/04C30B29/06
CPCH01F6/06H01F6/04C30B15/00C30B33/04C30B29/06
Inventor 汤洪明傅林坚刘黎明门玉娟
Owner 杭州慧翔电液技术开发有限公司
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