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Wave surface measuring system and method based on coaxial interference

A measurement system and coaxial technology, applied in measurement devices, instruments, optical devices, etc., can solve the problems of cumbersome measurement process, difficult to achieve, and high cost.

Inactive Publication Date: 2019-08-16
JINAN UNIVERSITY
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  • Abstract
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Problems solved by technology

However, the above-mentioned measurement method requires the use of complex optical components, which is expensive, cumbersome and difficult to implement.

Method used

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  • Wave surface measuring system and method based on coaxial interference
  • Wave surface measuring system and method based on coaxial interference
  • Wave surface measuring system and method based on coaxial interference

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Embodiment Construction

[0039] The present invention will be further described below in conjunction with drawings and embodiments.

[0040] see figure 1 , a wave surface measurement system based on coaxial interference, including: a Mach-Zehnder double-beam interference optical path, a coaxial interference recording unit 7, a two-dimensional mobile platform 8, a laser interferometer unit and a data processing unit 11; the optical element 12 to be measured is arranged on In the Mach-Zehnder double-beam interference light path, the Mach-Zehnder double-beam interference light path is used to generate two Mach-Zehnder interference light paths, one path is used as a reference light, and the other path is used as a measurement light, wherein the measurement light passes through the optical element 12 to be measured, and the The coaxial interference recording unit 7 is arranged on the two-dimensional mobile platform 8, and is used to combine the two Mach-Zehnder interference optical paths into a coaxial int...

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Abstract

The invention discloses a wave surface measuring system based on coaxial interference. The wave surface measuring system comprises a Mach-Zehnder two-beam interference light path, a coaxial interference recording unit, a two-dimensional moving platform, a laser interferometer unit and a data processing unit; an optical element to be measured is arranged in the Mach-Zehnder two-beam interference light path; the Mach-Zehnder two-beam interference light path is used for generating two beams of Mach-Zehnder interference light, one beam of the light serves as reference light, and the other beam ofthe light serves as measurement light, wherein the measuring light passes through the optical element to be measured; the coaxial interference recording unit is arranged on the two-dimensional movingplatform, and is used for combining the two beams of the Mach-Zehnder interference light into a coaxial interference signal, and recording light intensity information of the coaxial interference signal. The size and the precision of the measured wave surface are no longer limited by the size and the surface quality of a beam splitter, so that the system has a good application prospect in surface shape measurement of large-size wave surfaces and large-size optical elements.

Description

technical field [0001] The invention relates to the technical field of wave front measurement, in particular to a wave front measurement system and method based on coaxial interference. Background technique [0002] Wavefront is an important performance parameter of optical components and optical systems. Accurate measurement of wavefront can be used to judge the processing quality of optical components, and at the same time provide a quantitative reference for further improvement of wavefront, so it has important engineering application value. With the improvement of optical processing capabilities and the development of science and technology, the application of optical components shows that the processing size is getting larger and larger. Taking astronomical telescopes as an example, the size of a single mirror has already exceeded 1 meter in diameter. my country has recently successfully completed the grinding of a single silicon carbide mirror with a diameter of 4 mete...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 贾伟周常河王津项长铖谢永芳薄启宇
Owner JINAN UNIVERSITY
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