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Heating gate valve

A gate valve and heating device technology, applied in valve details, valve device, valve heating/cooling device, etc., can solve the problems of easy deposition, affecting the process, pollution, etc., and achieve the effect of absorbing displacement deviation

Active Publication Date: 2019-07-23
HIGHLIGHT TECH SHANGHAI CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the temperature of the gate valve is usually lower than that of the process chamber, so when the high-temperature gas in the process chamber touches the gate valve, solid particles in the gas are easily deposited on the gate valve, polluting or affecting the progress of subsequent processes

Method used

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Embodiment Construction

[0028] In order to further understand the technical characteristics, content and advantages of the present invention and the effects that can be achieved, the present invention is now combined with the accompanying drawings, and is described in detail as follows in the form of embodiments, and the accompanying drawings used herein are only intended to For the purpose of illustrating and assisting the description, it may not be the true proportion and precise configuration of the present invention after implementation, so the scale and configuration relationship of the attached drawings should not be interpreted to limit the scope of rights of the present invention in actual implementation. In addition, for ease of understanding, the same components in the following embodiments are described with the same symbols. Moreover, the size ratios of the components shown in the drawings are only for explaining the components and their structures, and are not intended to be limiting.

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Abstract

The invention provides a heating gate valve. The heating gate valve at least comprises a valve body provided with at least one valve port, a gate plate and a heating device, wherein the gate plate moves in the valve body to open or close the valve ports; the heating device is used for heating the gate valve and moves along with the gate plate. Thus, the valve body and the gate plate can be heatedto the required temperature, and precipitation of particles in gas can be avoided in the manufacturing process.

Description

technical field [0001] The invention relates to a gate valve structure, in particular to a heating gate valve. Background technique [0002] Gate valves are often used between fluid pipelines in process chambers, and are mainly used to control the opening or closing of fluid pipelines to adjust fluid flow and pressure control, etc. However, the temperature of the gate valve is usually lower than that of the process chamber, so when the high-temperature gas in the process chamber touches the gate valve, solid particles in the gas are easily deposited on the gate valve, polluting or affecting subsequent processes. Contents of the invention [0003] In view of this, the object of the present invention is to provide a heated gate valve to solve the problems of the conventional technology. [0004] In order to achieve the above object, the present invention provides a heated gate valve, which at least includes a valve body with at least one valve port; the gate plate is displa...

Claims

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Application Information

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IPC IPC(8): F16K49/00
CPCF16K49/002
Inventor 许俊树林赐民
Owner HIGHLIGHT TECH SHANGHAI CORP
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