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Method for operating vacuum pump system

A vacuum pump, vacuuming technology, applied in the direction of pump, pump parameters, piston pump, etc., can solve the problems of time conflict, high noise and so on

Inactive Publication Date: 2019-07-19
レイボルドゲーエムベーハー
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, low noise emission conflicts with the required short pumping times since short pumping times require high rotational speeds of the vacuum pumping device, wherein high rotational speeds lead to high noise levels

Method used

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  • Method for operating vacuum pump system
  • Method for operating vacuum pump system
  • Method for operating vacuum pump system

Examples

Experimental program
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Embodiment Construction

[0035] In the schematically depicted treatment chamber 10 the product is treated, for example coated. To this end, a vacuum is generated in the processing chamber 10 . A lock chamber 12 is connected to the processing chamber 10 for feeding products, materials etc. to be processed into the processing chamber. The lock chamber 12 includes a lock inlet 14 for feeding product or the like into the lock chamber 12 and a lock outlet 16 for transferring the product or the like from the lock chamber 12 into the processing chamber 10 .

[0036] In order to evacuate the lock chamber 12, the lock chamber 12 is connected to a vacuum pump system. The vacuum pump system includes a vacuum pump device 18 . In the illustrated exemplary embodiment, the vacuum pump arrangement 18 includes a main vacuum pump 20 and a pre-vacuum pump 22 arranged in series downstream of the main vacuum pump 20 . The main vacuum pump 20 is in particular a Roots pump or a screw pump. The main vacuum pump 20 is con...

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Abstract

A processing chamber (10) is connected to a lock chamber (12). A vacuum pump system is provided for evacuating the lock chamber (12) and / or the processing chamber (10). Said system comprises a vacuumpump device (18) comprising at least one vacuum pump (20, 22). The vacuum pump system also comprises a valve device (26) for connecting to the lock chamber (12) and a control device (30). For noise reduction, a cyclically occurring operating parameter is determined by means of the control device. From this it is determined at which point the valve is to be opened such that at some point before thevalve is opened, the speed of at least one of the vacuum pumps (20, 22) can be reduced. This leads to considerable noise reduction with good evacuation times.

Description

[0001] 【Technical field】 [0002] The invention relates to a method for operating a vacuum pump system, in particular for evacuating a lock chamber. The lock chamber is in particular connected to the processing chamber. Also, the vacuum pumping system can be directly connected to the processing chamber, so that no additional lock chamber is provided. [0003] 【Background technique】 [0004] In the processing chamber, for example, the product is subjected to, inter alia, vacuum processing, such as coating the product or the like. In order in particular to be able to supply product to the treatment chamber, the treatment chamber is connected to a lock chamber. To evacuate the lock chamber, the lock chamber is connected to a vacuum pump system. A vacuum pump system, which usually includes a plurality of vacuum pumps, includes, inter alia, a main pump or booster and a pre-vacuum pump. Here, especially Roots pumps or screw pumps are suitable as main vacuum pumps. Furthermore, t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B37/14F04B49/06F04C25/02F04C28/08F04C28/24
CPCF04B37/14F04C25/02F04C28/08F04C28/24F04B49/065F04B2201/021F04B2201/0601F04B2201/0604F04B2203/0209F04B2203/0211F04B35/04F04B49/20F04B2203/0201
Inventor 马提亚·纳尔沃尔德迈克尔·帕永克德克·席勒丹尼尔·施耐登巴赫塞巴斯提安·瓦尔策尔
Owner レイボルドゲーエムベーハー
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