Horizontal transportation type electrolytic plating apparatus enabling easy maintenance inspection

Abstract

The present invention provides a horizontal transportation type electrolytic plating apparatus enabling easy maintenance inspection of the inner side of an electrolytic plating tank by operators fromthe outside of the electrolytic plating tank. Operators from the outside of the tank can easily perform maintenance inspection of the inner side of the electrolytic plating tank through inspection ports (10, 22) formed by notching side surfaces of the electrolytic plating tank (1) and an auxiliary tank (20). Through pressing members (14), a side cover plate (11) can be simply and reliably mountedto and dismounted from the inspection ports (10) of the electrolytic plating tank. A side cover plate (23) provided with an up-down sliding type mounting and dismounting structure is mounted on inspection ports (22) of the auxiliary tank, and can be simply and reliably mounted and dismounted. A clamping tool (5) clamping two side edges of a substrate product (P) for transportation is configured such that the clamping tool can be simply mounted and dismounted through a bolt (41) for fixation and a bolt engagement hole (40). Through dismounting the clamping tool, maintenance inspection of the inner side of the electrolytic plating tank can be performed more easily.

Description

technical field [0001] The present invention relates to a horizontal transport type electrolytic plating device, and more particularly to an electrolytic plating device configured to facilitate maintenance and inspection of the inside of a plating treatment tank. Background technique [0002] There is known a horizontal conveyance type electrolytic plating apparatus in which a substrate product to which a cathodic current is supplied is positioned up and down in a plating solution in an electroplating treatment tank, and an upper electrode and a lower electrode to which an anodic current is supplied are placed on top of each other. Between them, they are transported horizontally in one direction, and the substrate products are subjected to electrolytic plating treatment during the horizontal transport process. In addition, as a device for horizontally conveying the substrate product in one direction, there is also known a horizontal conveyance type electrolytic plating devic...

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Problems solved by technology

[0003] In this horizontal transport type electrolytic plating device, although the maintenance and inspection work inside the electroplating treatment tank is performed after the electroplating solution is discharged, the inside of the electroplating treatment tank is surrounded by the side wall surface of the treatment tank, and the tank is complicatedly equipped. Internal spare parts, so it is difficult for operators to enter the inside of the treatment tank for operation, and maintenance and inspection work is not easy

[0004] In addition, in the electrolytic plating apparatus of the horizontal transfer type, in the electrolytic plating apparatus that uses a plurality of clamping jigs moving around as a device for horizontally conveying substrate products in one direction, a plurality of clamps arranged inside the treatment tank The existence of the clamping fixture becomes an obstacle, and it is difficult to perform maintenance and inspection work inside the plating treatment tank

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