A planar linear displacement driving device and its control method

Abstract

The invention discloses a plane linear displacement driving device, which comprises a support assembly, a large-stroke drive mechanism arranged on the support assembly, a micro-displacement drive mechanism connected to the output end of the large-stroke drive mechanism, and a micro-displacement drive mechanism connected with the micro-displacement The stage connected to the output end of the driving mechanism; the micro-displacement driving mechanism is a piezoelectric ceramic driver, and the large-stroke driving mechanism includes a torque output device, which is connected to the output end of the torque output device and used to rotate it A transmission assembly converted into linear motion, and the movement directions of the transmission assembly and the piezoelectric ceramic driver are both in the axial direction of the stage. The invention can simultaneously meet the requirements of large stroke and high-precision displacement control for workpiece displacement in the manufacturing process of high-precision engineering, and improve processing efficiency and processing accuracy. The invention also discloses a control method of the plane linear displacement driving device, and the beneficial effects are as above.

Description

technical field [0001] The invention relates to the technical field of driving devices, in particular to a plane linear displacement driving device. The invention also relates to a control method of the plane linear displacement driving device. Background technique [0002] In recent years, with the continuous improvement of my country's industrial level, the demand for ultra-precision technology in various fields such as national defense industry, aerospace technology, bioengineering, microelectronics engineering, nanoscience and technology has become increasingly urgent, and the improvement of precision means that Product performance and quality have been greatly improved. Specifically, the manufacture and testing of micro-electromechanical systems, the production of large-scale integrated circuits, ultra-precision machining and precision measurement, etc., are inseparable from ultra-precision positioning technology, which has become one of the key technologies in the fiel...

AI Technical Summary

Problems solved by technology

At the same time, in order to realize the displacement output of large strokes, it is necessary to use driving displacement devices with different working principles, such as driving components such as oil cylinders or air cylinders. This type of driving displacement device has a large working stroke, which can meet the large stroke displacement of workpieces in the manufacturing process. demand, but the displacement control of this type of driving displacement device is relatively rough, it is impossible to accurately control the displacement of the workpiece, and it is prone to displacement deviation, which cannot be applied to the production and manufacture of high-precision engineering

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