Large-stroke displacement driving device and control method thereof

Abstract

The invention discloses a large-stroke displacement driving device. The large-stroke displacement driving device comprises an objective table, a first-stage displacement amplifying mechanism and a second-stage displacement mechanism. The first-stage displacement amplifying mechanism comprises a lead screw, a movable supporting plate in threaded connection with the lead screw and a torque output device which is used for driving the lead screw to rotate so as to drive the movable supporting plate to linearly move in the axial direction of the objective table. The second-stage displacement mechanism comprises a plurality of piezoelectric ceramic drivers, wherein the bottom end of each piezoelectric ceramic driver is fixedly connected with the top surface of the movable supporting plate, the top end of each piezoelectric ceramic driver is in spherical hinge connection with the objective table, and the driving direction of each piezoelectric ceramic driver is the axial direction of the objective table. The large-stroke displacement driving device has the advantages of being large in stroke and high in precision, and achieves ultra-precise micro-displacement within the large stroke range. Moreover, the high-precision displacement motion and deflection motion of the objective table at different angles can be realized through coupling motion of the piezoelectric ceramic drivers. The invention further discloses a control method of the large-stroke displacement driving device. The control method has the above beneficial effects.

Description

technical field [0001] The invention relates to the technical field of precision displacement control combining optics, mechanics and electricity, in particular to a large-stroke displacement driving device and a control method thereof. Background technique [0002] In recent years, with the continuous improvement of my country's industrial level, the demand for ultra-precision technology in various fields such as national defense industry, aerospace technology, bioengineering, microelectronics engineering, nanoscience and technology has become increasingly urgent, and the improvement of precision means that Product performance and quality have been greatly improved. Specifically, the manufacture and testing of micro-electromechanical systems, the production of large-scale integrated circuits, ultra-precision machining and precision measurement, etc., are inseparable from ultra-precision positioning technology, which has become one of the key technologies in the field of prec...

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Problems solved by technology

[0005] In view of this, the object of the present invention is to provide a large-stroke displacement driving device and its control method. The structural design of the large-stroke displacement driving device can effectively solve the problem that the feed system is difficult to achieve ultra-precise micro-displacement within a large stroke range. question

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