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A large stroke displacement driving device and its control method

A driving device and large-stroke technology, which is applied in the direction of generator/motor, piezoelectric effect/electrostrictive or magnetostrictive motor, electrical components, etc., can solve problems such as difficult to achieve ultra-precise micro-displacement, and achieve high Accurate transportation, compensation for insufficient accuracy, and high accuracy effects

Inactive Publication Date: 2020-09-08
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0005] In view of this, the object of the present invention is to provide a large-stroke displacement driving device and its control method. The structural design of the large-stroke displacement driving device can effectively solve the problem that the feed system is difficult to achieve ultra-precise micro-displacement within a large stroke range. question

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  • A large stroke displacement driving device and its control method
  • A large stroke displacement driving device and its control method
  • A large stroke displacement driving device and its control method

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Embodiment Construction

[0038] The embodiment of the invention discloses a large stroke displacement driving device, which has large stroke, high precision, simple structure and is easy to implement.

[0039]The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0040] see figure 1 , figure 1 It is a structural schematic diagram of a large-stroke displacement driving device according to a specific embodiment of the present invention.

[0041] In a specific embodiment, the large-stroke displacement driving device provided by the present invent...

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Abstract

The invention discloses a large-stroke displacement driving device. The large-stroke displacement driving device comprises an objective table, a first-stage displacement amplifying mechanism and a second-stage displacement mechanism. The first-stage displacement amplifying mechanism comprises a lead screw, a movable supporting plate in threaded connection with the lead screw and a torque output device which is used for driving the lead screw to rotate so as to drive the movable supporting plate to linearly move in the axial direction of the objective table. The second-stage displacement mechanism comprises a plurality of piezoelectric ceramic drivers, wherein the bottom end of each piezoelectric ceramic driver is fixedly connected with the top surface of the movable supporting plate, the top end of each piezoelectric ceramic driver is in spherical hinge connection with the objective table, and the driving direction of each piezoelectric ceramic driver is the axial direction of the objective table. The large-stroke displacement driving device has the advantages of being large in stroke and high in precision, and achieves ultra-precise micro-displacement within the large stroke range. Moreover, the high-precision displacement motion and deflection motion of the objective table at different angles can be realized through coupling motion of the piezoelectric ceramic drivers. The invention further discloses a control method of the large-stroke displacement driving device. The control method has the above beneficial effects.

Description

technical field [0001] The invention relates to the technical field of precision displacement control combining optics, mechanics and electricity, in particular to a large-stroke displacement driving device and a control method thereof. Background technique [0002] In recent years, with the continuous improvement of my country's industrial level, the demand for ultra-precision technology in various fields such as national defense industry, aerospace technology, bioengineering, microelectronics engineering, nanoscience and technology has become increasingly urgent, and the improvement of precision means that Product performance and quality have been greatly improved. Specifically, the manufacture and testing of micro-electromechanical systems, the production of large-scale integrated circuits, ultra-precision machining and precision measurement, etc., are inseparable from ultra-precision positioning technology, which has become one of the key technologies in the field of prec...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/00
Inventor 李全超姚东徐钰蕾谭淞年
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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