All-day imaging detector with multifunctional window and preparation method thereof

An imaging detector and a multi-functional technology, applied in the field of photoelectric detection, can solve the problem of not being able to achieve all-day detection, and achieve the effect of avoiding the easy falling off of the film layer, reducing scattering, and having good process compatibility

Active Publication Date: 2022-04-05
XIAN TECH UNIV
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Problems solved by technology

[0006] The object of the present invention is to provide an all-day imaging detector with a multifunctional window and its preparation method, which integrates the window, microlens array, and filter array to solve the problem that the detector in the prior art can only work during the daytime. The problem of not being able to realize all-day detection

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  • All-day imaging detector with multifunctional window and preparation method thereof
  • All-day imaging detector with multifunctional window and preparation method thereof
  • All-day imaging detector with multifunctional window and preparation method thereof

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Embodiment Construction

[0030] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0031] The basic principle and idea of ​​this application are: the upper surface of the detector window is a microlens array, which has a converging effect on light and can improve the utilization rate of light; the lower surface of the window is a filter for both visible light color imaging and infrared imaging, which can Day and night; the pixel unit has two working modes, R+IR (red light + infrared light), G+IR (green light + infrared light) and B+IR (blue light + infrared light) three sub-pixel units during daytime work The obtained detection signal can be subtracted from the detection signal part obtained by the IR (infrared light) sub-pixel unit, so as to ensure that the detection signals of the R+IR, G+IR, and B+IR sub-pixel units show true color; when working at night, the visible light signal is very weak , the four filters can trans...

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Abstract

The invention relates to an all-time imaging detector with a multifunctional window and a preparation method thereof. The device includes a multifunctional window and a detection part, and the multifunctional window includes a microlens array, a window body and an optical filter array; the microlens The array is integrated on the upper surface of the window body, and the top surface of each microlens unit is a spherical cap structure, and the top view projection of the spherical cap is a square, and the squares of the spherical cap top view projections of adjacent microlens units are connected; the filter array It is plated on the lower surface of the window body; the filter array includes four kinds of filters, which are respectively three kinds of monochromatic visible light combined with an infrared band-pass filter and an infrared filter; the detection part It is composed of an array of pixel units, each pixel unit includes four sub-pixel units, and the four sub-pixel units are directly opposite to four kinds of filters; the invention also introduces the preparation method of the microlens array and the detection method of the detector . The device of the invention can realize all-day detection.

Description

technical field [0001] The invention belongs to the technical field of photoelectric detection, and in particular relates to an all-time imaging detector with a multifunctional window and a preparation method thereof. Background technique [0002] Photodetectors are detected by changes in the conductivity of the irradiated material caused by radiation. Photodetectors have a wide range of uses. They are mainly used in imaging and detection, industrial automatic control, photometry, etc. in the visible or near-infrared band; in the infrared band, they are mainly used in infrared thermal imaging, infrared remote sensing, etc. [0003] Traditional photodetectors are composed of discrete windows, microlens arrays, filter arrays and pixel unit arrays, which need to be assembled separately to form detectors. The window is designed for the detector to penetrate the light wave and isolate the air for vacuum packaging. The microlens array below the window can pass through the detect...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L27/146H01L31/09
CPCH01L31/09H01L27/146
Inventor 刘卫国王卓曼刘欢白民宇韩军王曦梁海锋安妍
Owner XIAN TECH UNIV
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