Crucible device for growing crystal

Abstract

The invention provides a crucible device for growing crystal. The crucible device comprises a support device, a quartz crucible and an anti-deformation ring, wherein the quartz crucible is arranged inside the support device, and the edge of the quartz crucible is higher than that of the support device; the anti-deformation ring is provided with a groove, the edge of the quartz crucible is clampedin the groove of the anti-deformation ring, and the anti-deformation ring is prepared from a high temperature-resistant material. According to the crucible device for growing the crystal provided by the invention, the anti-deformation ring therein can prevent the quartz crucible from generating a turned-down edge, has a relatively small influence on thermal field temperature distribution, and cooperates well with the quartz crucible and the support device.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a crucible device for growing crystals. Background technique [0002] At present, the method for preparing large-sized single crystal silicon is mainly the Czochralski method, that is, polycrystalline silicon is melted in a crucible, the seed crystal is immersed in the liquid surface of the silicon melt, and the seed crystal is slowly pulled, thereby A silicon single crystal having the same crystallographic direction as the seed crystal is grown. Among them, in order to avoid pollution to the silicon material, a quartz crucible is usually used as a container for the silicon material. Since the quartz crucible becomes glassy at high temperature, the outer graphite crucible is required to provide support to ensure that the quartz crucible maintains a fixed shape during the crystal growth process. [0003] With the continuous development of crystal growth technology, the si...

AI Technical Summary

Problems solved by technology

The main reasons for this phenomenon include: hanging edges of polysilicon material, partial defects in the quality of quartz crucible, and unreasonable chemical material

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