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Multi-stage linkage output type multi-freedom-degree micro-displacement platform

A technology of micro-moving platform and output platform, applied in the field of micro-moving platform, can solve the problems of not large enough output table, single direction, less degree of freedom, etc., to achieve the convenience of preloading piezoelectric actuators, easy to ensure machining accuracy, and no mechanical The effect of friction

Active Publication Date: 2019-05-10
NINGBO UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The existing micro-movement platforms are easy to design. Although some have amplification mechanisms, their magnifications are small, the output stroke is small, and the effective output table is not large enough, which limits the operating space.
And its displacement output can only output micro-displacement along the x, y, z axis directions, the direction is single, and the degree of freedom is less

Method used

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  • Multi-stage linkage output type multi-freedom-degree micro-displacement platform
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  • Multi-stage linkage output type multi-freedom-degree micro-displacement platform

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Embodiment Construction

[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the embodiments described below are some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0031] see Figure 1-Figure 6 As shown, a multi-degree-of-freedom micro-motion platform with multi-stage linkage output includes a working platform 12, a flexible amplification unit structure 2, a base 13 and a support rod 15;

[0032] The base 3 is fixed with N flexible amplifying unit structures 2 uniformly distributed in the circumferential direction, wherein N≥3, N is an integer; the working platform 12 is supported by a support rod 15 connected to the fl...

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Abstract

The invention discloses a multi-stage linkage output type multi-freedom-degree micro-displacement platform, and relates to a micro-displacement platform. The micro-displacement platform comprises a working platform, flexible amplifying unit structures, a base and supporting rods; the working platform is supported by the supporting rods connected with the flexible amplifying unit structures; each flexible amplifying unit structure comprises a vertical frame and a piezoelectric stack driver; each vertical frame comprises a first bracket, a second bracket, a fixing rod, an output rod, an output platform, a rocking rod, a guide rod and an amplifying mechanism; the amplifying mechanism comprise first amplifying rods, second amplifying rods and third amplifying rods; each output platform is provided with the corresponding vertically-arranged supporting rod, and a spherical hinge is installed at the top of the supporting rod and detachably connected with the working platform; and one of struts of each fixing rod is detachably connected with the base. The micro-displacement platform is simple in structure, reasonable in design, and convenient to disassemble and assemble, and the working displacement of the working platform is increased.

Description

technical field [0001] The invention relates to a micro-motion platform, in particular to a multi-degree-of-freedom micro-motion platform with multi-stage linkage output. Background technique [0002] The multi-degree-of-freedom micro-motion platform is a micro-displacement mechanism that transmits force and displacement through a flexible hinge mechanism that can produce elastic deformation and can translate or rotate with multiple degrees of freedom. And it is driven by a piezoelectric actuator, so it has high displacement resolution, fast response speed, large driving force and rigidity, small size and strong bearing capacity. Therefore, it plays an increasingly important role in precision machining and measurement, optical fiber docking, microelectronics engineering, cell micromanipulation and other technical fields that require micro / nano positioning. Specific applications include in the processing of micro-nano parts, the micro-feeding of the tool or the compensation ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B25H1/14B25H1/18
Inventor 陈永杰杨依领黎贵江顾浩然蔡健敏娄军强洪松
Owner NINGBO UNIV
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