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Accurate testing device and method for geometric parameter of complex optical curved surface

A testing device and curved surface technology, applied in the field of complex optical curved surface detection, can solve the problems of low precision and good versatility of geometric parameter testing, and achieve the effects of clear physical concept, good versatility and high precision

Active Publication Date: 2019-05-07
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0005] Aiming at the technical problem of low measurement accuracy of geometric parameters caused by optical path refraction in the vertical interference inspection of large-diameter complex optical curved surfaces, the present invention proposes an accurate measurement of the geometric parameters of the deflected optical path that is suitable for all large-diameter complex optical curved surface vertical interference inspections. The device and method mainly measure the focal point of the interferometer, all the reference plane characteristics of the complex curved surface and the characteristics of the folding mirror, and realize the vertex curvature radius R, off-axis amount d and eccentricity of the large-caliber complex optical surface through geometric operations such as mirroring and projection. Accurate testing of geometric parameters such as Δ, simple data processing, calculation, and operation process, low testing cost, and good versatility

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  • Accurate testing device and method for geometric parameter of complex optical curved surface
  • Accurate testing device and method for geometric parameter of complex optical curved surface

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Embodiment Construction

[0023] In the following description, specific details such as specific system structures and technologies are presented for the purpose of illustration rather than limitation, so as to thoroughly understand the embodiments of the present invention. It will be apparent, however, to one skilled in the art that the invention may be practiced in other embodiments without these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the present invention with unnecessary detail.

[0024] Such as figure 1 As shown, the accurate test device for the radius of curvature of the vertex of the large-diameter complex optical surface of the present invention includes: a laser tracker 1, a laser interferometer 2, a folding mirror 3, a compensation element 4, a large-diameter complex optical surface to be measured 5, and an adjustment mechanism 6.

[0025] Such as figure 2 As show...

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Abstract

An accurate testing device and a method for geometric parameters of a complex optical curved surface, suitable for accurate testing of geometric parameters of all vertical test intervention folding optical path with a large-caliber complex optical curved surface. The device comprises a laser tracker (1), a laser interferometer (2), a folding mirror (3), a compensation element (4), and an adjustingmechanism (6). The position and angle between the laser interferometer (2), the folding mirror (3), the compensation element (4), a to-be-tested optical curved surface (5), and the adjusting mechanism (6) are adjustable. The target ball of the laser tracker (1) is placed near an interferometer focus (F). The accurate testing of the geometric parameters such as the vertex curvature radius R, the off-axis quantity d, and the eccentricity Delta of the large-caliber complex optical curved surface is realized mainly by measure of the interferometer focus, all reference surface features of the complex curved surface, and the folding mirror characteristic with geometric operations such as mirroring and projection. The device and the method provided by the invention have simple process of data processing, calculation, and operation, low testing cost, and great versatility.

Description

technical field [0001] The invention relates to the technical field of detection of complex optical curved surfaces, in particular to an accurate testing device and method for geometric parameters of large-diameter complex optical curved surfaces. Background technique [0002] Large-aperture complex optical surfaces are important components of modern optical systems. During the development process, high-precision testing of geometric parameters such as vertex curvature radius, off-axis and eccentricity is the core key technology to ensure the quality of large-aperture complex optical surfaces. Provide technical support for the good comprehensive performance of modern optical systems. [0003] Due to the influence of factors such as environmental airflow disturbance and the support structure of the mirror body, the processing and detection scheme with vertical optical axis is generally adopted for large-diameter complex curved surfaces. In addition, the laser interferometer m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24G01B11/255
Inventor 程强胡海翔罗霄薛栋林张学军
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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