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Stepping rotation sample station and microscopic particle three-dimensional surface imaging method and system

A sample stage and microcosmic technology, applied in the direction of material analysis, measuring devices, instruments, etc. using wave/particle radiation, can solve problems such as complexity, low efficiency, and low accuracy of three-dimensional full surfaces

Active Publication Date: 2019-05-03
PETROCHINA CO LTD
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Problems solved by technology

[0005] The present invention is used to solve the defects of complexity and low efficiency in the method for determining the three-dimensional full surface of the heterogeneous anisotropic sample in the prior art, and in addition, the analyzed three-dimensional full surface has the defect of low accuracy

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Embodiment Construction

[0051] In order to make the technical features and effects of the present invention more obvious, the technical solutions of the present invention will be further described below in conjunction with the accompanying drawings. The present invention may also be illustrated or implemented by other different specific examples. Anyone skilled in the art is within the scope of the claims. The equivalent transformations made inside belong to the protection category of the present invention.

[0052] In the description of this specification, descriptions with reference to the terms "an embodiment", "a specific embodiment", "some implementations", "for example," etc. mean specific features, structures, and materials described in conjunction with the embodiment or example. Or the feature is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or exampl...

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Abstract

The invention provides a stepping rotation sample station and a microscopic particle three-dimensional surface imaging method and system. The method comprises steps that a microscopic particle sampleis pre-processed; micron CT is utilized to scan the pre-processed microscopic particle sample to obtain micron CT data of the microscopic particle sample; a scanning electron microscope and the stepping rotation sample station are utilized to perform rotation imaging of the microscopic particle sample obtained by pre-processing to obtain scanning electron microscope images of the microscopic particle sample in respective angles; the micron CT data is reconstructed to obtain the three-dimensional data volume including three-dimensional contours and the internal structure information, and the scanning electron microscopy images of the respective angles are attached one by one to the surface of the three-dimensional data volume to obtain the microscopic particle three-dimensional full surface. The method is advantaged in that three-dimensional display of micro-nano details on the surface of the microscopic particles and display of the internal structure of the microscopic particles can beefficiently realized.

Description

Technical field [0001] The invention relates to the field of microscopic particles, and in particular to a step-rotating sample stage, a three-dimensional surface imaging method and system for microscopic particles. Background technique [0002] Scanning electron microscopy imaging technology is an indispensable material characterization analysis method in the field of materials. Due to its high resolution, continuously adjustable magnification, large depth of field and other advantages, it can also be used for element analysis by assembling EDS and other probes, and has been expanded and applied In various fields. [0003] In my country, scanning electron microscopy was introduced into the field of geology as early as the 1970s for the study of mineral identification, pore characterization, element analysis, organic matter distribution, and so on. For decades, it has supported the development of disciplines such as geology, petroleum reservoir geology, sedimentary stratigraphy, a...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/046G01N23/2251G01N15/00
Inventor 王晓琦孙亮李建明金旭焦航李鑫刘晓丹
Owner PETROCHINA CO LTD
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