Pipeline equipment for temperature control of phosphoric acid machine

Abstract

The invention provides a piece of pipeline equipment for temperature control of a phosphoric acid machine. A first liquid inlet of a direct supply tank is connected with a liquid outlet of a first buffer tank. A liquid outlet of the direct supply tank is connected with a second liquid inlet thereof to constitute a main circulation loop in which a number of working chambers are connected. The working chambers are connected with first and second switching valves. The first switching valve is connected with a discharge outlet. The second switching valve is connected with a liquid inlet of a recovery tank. A liquid outlet of the recovery tank is connected with a liquid inlet of a second buffer tank. A liquid outlet of the second buffer tank is connected to a pipeline between the liquid outletof the first buffer tank and the first liquid inlet of the direct supply tank. A cooling device is arranged on a pipeline between the liquid outlet of the second buffer tank and the first liquid inletof the direct supply tank. By adding the cooling device on the pipeline between the liquid outlet of the second buffer tank and the first liquid inlet of the direct supply tank, the initial temperature of phosphoric acid entering the direct supply tank is reduced, the temperature difference between the buffer tanks and the direct supply tank is reduced, the temperature of phosphoric acid in the direct supply tank is controlled, and the alarm probability is reduced.

Description

technical field [0001] The invention relates to semiconductor manufacturing equipment, in particular to pipeline equipment used for temperature control of phosphoric acid machines. Background technique [0002] Such as figure 1 as shown, figure 1 It is a schematic diagram of a chemical liquid circulation device of a phosphoric acid machine in the prior art. The device comprises: a first buffer tank 6 with a liquid inlet and a liquid outlet; a direct supply tank 9 with the first and second liquid inlets and a liquid outlet; the liquid inlet of the first buffer tank 6 and the liquid outlet are respectively connected with pipelines; the first liquid inlet of the direct supply tank 9 is connected with the liquid outlet of the first buffer tank 6 through the pipeline; the liquid outlet of the direct supply tank 9 passes through The pipeline is connected with its second liquid inlet to form a main circulation loop 10, and several working chambers 5 are connected to the pipeline...

AI Technical Summary

Problems solved by technology

Once the machine continues to work, it is easy to use too much H3PO4, and the phosphoric acid liquid buffer tank supplies the phosphoric acid to the liquid direct supply tank too quickly, resulting in poor temperature control, exceeding the set value, and an alarm occurs

At this time, the continuous operation of the machine stops, and the operation continues after re-controlling the temperature, which increases the process risk and reduces the product circulation speed

Images